Inventor

HATANO MASAYUKI

JP34 patents

⚠️ This page may combine multiple inventors who share the name “HATANO MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HATANO MASAYUKI

HATANO MASAYUKI

Imprint method and imprint apparatus

Control method for semiconductor manufacturing apparatus, control system for semiconductor manufacturing apparatus, and manufacturing method for semiconductor device

Semiconductor manufacturing apparatus and method for manufacturing semiconductor device

Imprint method, imprinting equipment, and method for manufacturing semiconductor device

Pattern formation method and a method for manufacturing a semiconductor device

TOSHIBA KK

Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon

Photomask, photomask superimposition correcting method, and manufacturing method of semiconductor device

Pattern forming method, processing method, and processing apparatus

Pattern formation method

KIOXIA CORP

Imprint apparatus, imprint method, and method of manufacturing semiconductor device

Template, manufacturing method of template, and manufacturing method of semiconductor device

Imprint apparatus, imprint method, and manufacturing method of semiconductor device

Imprint method, method of manufacturing semiconductor device, and imprint device

MITSUBISHI ELECTRIC CORP

Circuit breaking device

Arrangement for gas circuit breaker with reactor and capacitor connected in series and method for setting its circuit parameter

DC circuit breaking device

TOSHIBA MEMORY CORP

Imprint apparatus, imprint method, and method of manufacturing semiconductor device

Template forming method, template, and template base material

Template and pattern formation method

OHMI TADAHIRO

Shutoff-opening devices and fluid control apparatus comprising such devices

Shutoff-opening device

TOKYO MAGNETIC PRINTING

Reversible information display medium of liquid crystal type and non-contact IC card utilizing the same

Magnetic recording medium and method for manufacturing the same

FUJIKIN KK

Device for heating fluid control apparatus

Apparatus for and method of designing fluid control devices

CANON KK

Imprint apparatus, imprint method, and article manufacturing method

Imprint apparatus, imprint method, and article manufacturing method

SHIBAURA MECHATRONICS CORP

Imprint template manufacturing apparatus and imprint template manufacturing method

Imprint template treatment apparatus

TADAHIRO OHMI

Fluid control apparatus

FURUTONO YOHKO

Imprint apparatus and method

NAKAGAWA YASUTADA

Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon

FUKUHARA KAZUYA

Pattern forming method, pattern forming apparatus, and method for manufacturing semiconductor device

ASANO MASAFUMI

Pattern forming method, processing method, and processing apparatus