Inventor
HUANG ZUBIN
US29 patents
Patents
29 patentsUS11527408B2Dec 13, 2022
Multiple spacer patterning schemes
APPLIED MATERIALS INC4 citations71
USD1071886SApr 22, 2025
Substrate support for a substrate processing chamber
APPLIED MATERIALS INC3 citations69
US12421607B2Sep 23, 2025
Systems and methods for substrate support temperature control
APPLIED MATERIALS INC0 citations62
US12365986B2Jul 22, 2025
Remote capacitively coupled plasma deposition of amorphous silicon
APPLIED MATERIALS INC0 citations62
US12205818B2Jan 21, 2025
Boron concentration tunability in boron-silicon films
APPLIED MATERIALS INC0 citations62
US11981998B2May 14, 2024
Systems and methods for substrate support temperature control
APPLIED MATERIALS INC1 citations62
US11961739B2Apr 16, 2024
Boron concentration tunability in boron-silicon films
APPLIED MATERIALS INC0 citations62
US11939675B2Mar 26, 2024
Apparatus and methods for improving thermal chemical vapor deposition (CVD) uniformity
APPLIED MATERIALS INC1 citations62
US12568791B2Mar 3, 2026
Controlling concentration profiles for deposited films using machine learning
APPLIED MATERIALS INC0 citations60
US11315787B2Apr 26, 2022
Multiple spacer patterning schemes
APPLIED MATERIALS INC0 citations60
US12451345B2Oct 21, 2025
PECVD of SiBN thin films with low leakage current
APPLIED MATERIALS INC0 citations59
US12062567B2Aug 13, 2024
Systems and methods for substrate support temperature control
APPLIED MATERIALS INC1 citations59
USD1009817SJan 2, 2024
Shadow ring lift pin
APPLIED MATERIALS INC0 citations59
USD997893SSep 5, 2023
Shadow ring lift plate
APPLIED MATERIALS INC1 citations59
USD997894SSep 5, 2023
Shadow ring lift assembly
APPLIED MATERIALS INC0 citations59
US11562902B2Jan 24, 2023
Hydrogen management in plasma deposited films
APPLIED MATERIALS INC0 citations57
US11598004B2Mar 7, 2023
Lid assembly apparatus and methods for substrate processing chambers
APPLIED MATERIALS INC1 citations56
US12315746B2May 27, 2025
Bottom cover plate to reduce wafer planar nonuniformity
APPLIED MATERIALS INC0 citations55
US11009455B2May 18, 2021
Precursor delivery system and methods related thereto
APPLIED MATERIALS INC1 citations55
US12486576B2Dec 2, 2025
Shadow ring lift to improve wafer edge performance
APPLIED MATERIALS INC0 citations52
US10656100B2May 19, 2020
Surface acoustic wave sensors in semiconductor processing equipment
APPLIED MATERIALS INC0 citations51
US10094788B2Oct 9, 2018
Surface acoustic wave sensors in semiconductor processing equipment
APPLIED MATERIALS INC0 citations51
US11830706B2Nov 28, 2023
Heated pedestal design for improved heat transfer and temperature uniformity
APPLIED MATERIALS INC0 citations50
US11532525B2Dec 20, 2022
Controlling concentration profiles for deposited films using machine learning
APPLIED MATERIALS INC0 citations50
US11456173B2Sep 27, 2022
Methods for modifying photoresist profiles and tuning critical dimensions
APPLIED MATERIALS INC0 citations50
US11798820B2Oct 24, 2023
Gas delivery systems and methods
APPLIED MATERIALS INC0 citations49
US12255054B2Mar 18, 2025
Methods to eliminate of deposition on wafer bevel and backside
APPLIED MATERIALS INC0 citations47
US10513008B2Dec 24, 2019
Chemical mechanical polishing smart ring
APPLIED MATERIALS INC0 citations47
US11939668B2Mar 26, 2024
Gas delivery for tungsten-containing layer
APPLIED MATERIALS INC0 citations44