USD1071886SActiveUtility

Substrate support for a substrate processing chamber

63
Assignee: APPLIED MATERIALS INCPriority: Jan 20, 2022Filed: Jan 20, 2022Granted: Apr 22, 2025
Est. expiryJan 20, 2042(~15.5 yrs left)· nominal 20-yr term from priority
Inventors:Zhixiu LiangMichael S. JacksonJiang LuCheng-Hsiung TsaiTomoharu MatsushitaZubin Huang
63
PatentIndex Score
3
Cited by
62
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a substrate support for a substrate processing chamber, as shown and described.

Join the waitlist — get patent alerts

Track USD1071886S — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.