Inventor · disambiguated record
Zubin Huang
Also filed as: HUANG ZUBIN
28 granted patents·15 pending applications·13 citations·filing 2016–2025
92Inventor score
Files withAPPLIED MATERIALS INC43
Top patents by PatentIndex Score
43 records- 0194US11527408B2Multiple spacer patterning schemesAPPLIED MATERIALS INC·Filed 2020·Granted Dec 13, 2022·4 cites·8 claims
- 0287US11981998B2Systems and methods for substrate support temperature controlAPPLIED MATERIALS INC·Filed 2020·Granted May 14, 2024·1 cites·12 claims
- 0385US12421607B2Systems and methods for substrate support temperature controlAPPLIED MATERIALS INC·Filed 2024·Granted Sep 23, 2025·0 cites·15 claims
- 0482US12205818B2Boron concentration tunability in boron-silicon filmsAPPLIED MATERIALS INC·Filed 2024·Granted Jan 21, 2025·0 cites·18 claims
- 0579US12062567B2Systems and methods for substrate support temperature controlAPPLIED MATERIALS INC·Filed 2020·Granted Aug 13, 2024·1 cites·14 claims
- 0679US2025112046A1Boron concentration tunability in boron-silicon filmsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0777US12451345B2PECVD of SiBN thin films with low leakage currentAPPLIED MATERIALS INC·Filed 2024·Granted Oct 21, 2025·0 cites·20 claims
- 0877US11598004B2Lid assembly apparatus and methods for substrate processing chambersAPPLIED MATERIALS INC·Filed 2020·Granted Mar 7, 2023·1 cites·11 claims
- 0977US2024229230A1Gas delivery for tungsten-containing layerAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1077US2025305142A1Remote capacitively coupled plasma deposition of amorphous siliconAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1173US11939675B2Apparatus and methods for improving thermal chemical vapor deposition (CVD) uniformityAPPLIED MATERIALS INC·Filed 2018·Granted Mar 26, 2024·1 cites·20 claims
- 1272US11939668B2Gas delivery for tungsten-containing layerAPPLIED MATERIALS INC·Filed 2022·Granted Mar 26, 2024·0 cites·20 claims
- 1370US11009455B2Precursor delivery system and methods related theretoAPPLIED MATERIALS INC·Filed 2019·Granted May 18, 2021·1 cites·17 claims
- 1470US2023093450A1Multiple spacer patterning schemesAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1569US11961739B2Boron concentration tunability in boron-silicon filmsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 16, 2024·0 cites·8 claims
- 1665US11315787B2Multiple spacer patterning schemesAPPLIED MATERIALS INC·Filed 2020·Granted Apr 26, 2022·0 cites·14 claims
- 1764US2023146981A1Hydrogen management in plasma deposited filmsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1863USD1071886SSubstrate support for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2022·Granted Apr 22, 2025·3 cites·1 claims
- 1961US10656100B2Surface acoustic wave sensors in semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2018·Granted May 19, 2020·0 cites·20 claims
- 2060US11562902B2Hydrogen management in plasma deposited filmsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 24, 2023·0 cites·17 claims
- 2159US12365986B2Remote capacitively coupled plasma deposition of amorphous siliconAPPLIED MATERIALS INC·Filed 2019·Granted Jul 22, 2025·0 cites·18 claims
- 2256US12486576B2Shadow ring lift to improve wafer edge performanceAPPLIED MATERIALS INC·Filed 2021·Granted Dec 2, 2025·0 cites·19 claims
- 2356US12255054B2Methods to eliminate of deposition on wafer bevel and backsideAPPLIED MATERIALS INC·Filed 2020·Granted Mar 18, 2025·0 cites·17 claims
- 2454US2020211834A1Methods for forming films containing silicon boron with low leakage currentAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2552US11532525B2Controlling concentration profiles for deposited films using machine learningAPPLIED MATERIALS INC·Filed 2021·Granted Dec 20, 2022·0 cites·20 claims
- 2652US2023265561A1Pocket heater with purge to improve gap toleranceAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2751US2023357929A1Apparatus and methods to promote wafer edge temperature uniformityAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2850US12315746B2Bottom cover plate to reduce wafer planar nonuniformityAPPLIED MATERIALS INC·Filed 2021·Granted May 27, 2025·0 cites·20 claims
- 2950US11830706B2Heated pedestal design for improved heat transfer and temperature uniformityAPPLIED MATERIALS INC·Filed 2019·Granted Nov 28, 2023·0 cites·19 claims
- 3050US10094788B2Surface acoustic wave sensors in semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2016·Granted Oct 9, 2018·0 cites·20 claims
- 3149US2023374660A1Hardware to uniformly distribute active species for semiconductor film processingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3248US2022093371A1Radiation shield for removing backside deposition at lift pin locationsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3348US2023023764A1Surface profiling and texturing of chamber componentsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3447US11798820B2Gas delivery systems and methodsAPPLIED MATERIALS INC·Filed 2020·Granted Oct 24, 2023·0 cites·20 claims
- 3546USD997893SShadow ring lift plateAPPLIED MATERIALS INC·Filed 2021·Granted Sep 5, 2023·1 cites·1 claims
- 3646US10513008B2Chemical mechanical polishing smart ringAPPLIED MATERIALS INC·Filed 2017·Granted Dec 24, 2019·0 cites·18 claims
- 3746US2022108872A1Bevel backside deposition eliminationAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3845US2021183657A1Surface profiling and texturing of chamber componentsAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3944US11456173B2Methods for modifying photoresist profiles and tuning critical dimensionsAPPLIED MATERIALS INC·Filed 2020·Granted Sep 27, 2022·0 cites·19 claims
- 4043US2020043722A1Cvd based spacer deposition with zero loadingAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4141US2022108891A1Modular zone control for a processing chamberAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 4231USD1009817SShadow ring lift pinAPPLIED MATERIALS INC·Filed 2021·Granted Jan 2, 2024·0 cites·1 claims
- 4329USD997894SShadow ring lift assemblyAPPLIED MATERIALS INC·Filed 2021·Granted Sep 5, 2023·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →