Inventor · disambiguated record
Todd C. Bailey
Also filed as: BAILEY TODD · BAILEY TODD C · BAILEY TODD CHRISTOPHER
32 granted patents·9 pending applications·1,535 citations·filing 2001–2017
98Inventor score
Top patents by PatentIndex Score
41 records- 0198US7229273B2Imprint lithography template having a feature size under 250 nmUNIV TEXAS·Filed 2004·Granted Jun 12, 2007·80 cites·10 claims
- 0298US6921615B2High-resolution overlay alignment methods for imprint lithographyUNIV TEXAS·Filed 2001·Granted Jul 26, 2005·161 cites·26 claims
- 0398US6916585B2Method of varying template dimensions to achieve alignment during imprint lithographyUNIV TEXAS·Filed 2003·Granted Jul 12, 2005·108 cites·30 claims
- 0498US6842229B2Imprint lithography template comprising alignment marksUNIV TEXAS·Filed 2003·Granted Jan 11, 2005·132 cites·19 claims
- 0598US6696220B2Template for room temperature, low pressure micro-and nano-imprint lithographyUNIV TEXAS·Filed 2001·Granted Feb 24, 2004·606 cites·44 claims
- 0697US6986975B2Method of aligning a template with a substrate employing moire patternsUNIV TEXAS·Filed 2004·Granted Jan 17, 2006·73 cites·23 claims
- 0795US6954275B2Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithographyBOARDS OF REGENTS THE UNIVERSI·Filed 2001·Granted Oct 11, 2005·94 cites·49 claims
- 0894US8033814B2Device for holding a template for use in imprint lithographyUNIV TEXAS·Filed 2010·Granted Oct 11, 2011·10 cites·18 claims
- 0994US7303383B1Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marksUNIV TEXAS·Filed 2004·Granted Dec 4, 2007·29 cites·26 claims
- 1093US6919152B2High resolution overlay alignment systems for imprint lithographyUNIV TEXAS·Filed 2003·Granted Jul 19, 2005·57 cites·28 claims
- 1192US7060324B2Method of creating a dispersion of a liquid on a substrateUNIV TEXAS·Filed 2004·Granted Jun 13, 2006·26 cites·20 claims
- 1290US7186483B2Method of determining alignment of a template and a substrate having a liquid disposed therebetweenUNIV TEXAS·Filed 2004·Granted Mar 6, 2007·45 cites·24 claims
- 1390US6902853B2Dual wavelength method of determining a relative position of a substrate and a templateUNIV TEXAS·Filed 2004·Granted Jun 7, 2005·48 cites·19 claims
- 1486US9223202B2Method of automatic fluid dispensing for imprint lithography processesCHOI BYUNG-JIN·Filed 2007·Granted Dec 29, 2015·15 cites·2 claims
- 1586US7083898B1Method for performing chemical shrink process over BARC (bottom anti-reflective coating)IBM·Filed 2005·Granted Aug 1, 2006·11 cites·20 claims
- 1680US7288478B2Method for performing chemical shrink process over BARC (bottom anti-reflective coating)IBM·Filed 2005·Granted Oct 30, 2007·5 cites·7 claims
- 1779US8359562B2System and method for semiconductor device fabrication using modelingINFINEON TECHNOLOGIES AG·Filed 2011·Granted Jan 22, 2013·5 cites·35 claims
- 1874US7651947B2Mask forming and implanting methods using implant stopping layer and mask so formedIBM·Filed 2006·Granted Jan 26, 2010·4 cites·17 claims
- 1972US8495527B2Pattern recognition with edge correction for design based metrologyBAILEY TODD C·Filed 2011·Granted Jul 23, 2013·4 cites·20 claims
- 2071US7708542B2Device for holding a template for use in imprint lithographyUNIV TEXAS·Filed 2003·Granted May 4, 2010·6 cites·18 claims
- 2168US7926006B2Variable fill and cheese for mitigation of BEOL topographyIBM·Filed 2007·Granted Apr 12, 2011·4 cites·16 claims
- 2267US8415212B2Method of enhancing photoresist adhesion to rare earth oxidesSCHAEFFER JAMES K·Filed 2010·Granted Apr 9, 2013·3 cites·20 claims
- 2365US8514374B2Alignment method for semiconductor processingBAILEY TODD C·Filed 2009·Granted Aug 20, 2013·2 cites·4 claims
- 2464US9928316B2Process-metrology reproducibility bands for lithographic photomasksIBM·Filed 2015·Granted Mar 27, 2018·1 cites·15 claims
- 2564US8429570B2Pattern recognition with edge correction for design based metrologyBAILEY TODD C·Filed 2010·Granted Apr 23, 2013·2 cites·25 claims
- 2664US8330937B2Stray light feedback for dose control in semiconductor lithography systemsMAROKKEY SAJAN·Filed 2009·Granted Dec 11, 2012·1 cites·18 claims
- 2760US8110496B2Method for performing chemical shrink process over BARC (bottom anti-reflective coating)BAILEY TODD CHRISTOPHER·Filed 2007·Granted Feb 7, 2012·1 cites·5 claims
- 2856US2008095878A1Imprint Lithography Template Having a Feature Size Under 250 nmUNIV TEXAS·Filed 2007·Application pending·0 cites
- 2956US2009214689A1Imprint Lithography Templates Having Alignment MarksUNIV TEXAS·Filed 2009·Application pending·0 cites
- 3054US10210292B2Process-metrology reproducibility bands for lithographic photomasksIBM·Filed 2017·Granted Feb 19, 2019·0 cites·15 claims
- 3154US7998871B2Mask forming and implanting methods using implant stopping layerIBM·Filed 2008·Granted Aug 16, 2011·0 cites·11 claims
- 3252US7583362B2Stray light feedback for dose control in semiconductor lithography systemsINFINEON TECHNOLOGIES AG·Filed 2004·Granted Sep 1, 2009·2 cites·28 claims
- 3350US8491984B2Structure resulting from chemical shrink process over BARC (bottom anti-reflective coating)BAILEY TODD CHRISTOPHER·Filed 2011·Granted Jul 23, 2013·0 cites·14 claims
- 3447US2006145398A1Release layer comprising diamond-like carbon (DLC) or doped DLC with tunable composition for imprint lithography templates and contact masksUNIV TEXAS·Filed 2004·Application pending·0 cites
- 3544US2004163563A1Imprint lithography template having a mold to compensate for material changes of an underlying liquidUNIV TEXAS·Filed 2004·Application pending·0 cites
- 3643US2007275330A1Bottom anti-reflective coatingIBM·Filed 2006·Application pending·0 cites
- 3742US2005064344A1Imprint lithography templates having alignment marksUNIV TEXAS·Filed 2003·Application pending·0 cites
- 3841US7514356B2Ribs for line collapse prevention in damascene structuresINFINEON TECHNOLOGIES AG·Filed 2005·Granted Apr 7, 2009·0 cites·22 claims
- 3941US2006153118A1System and method for wireless ip address capacity optimizationIBM·Filed 2005·Application pending·0 cites
- 4038US2002094496A1Method and system of automatic fluid dispensing for imprint lithography processesFiled 2002·Application pending·0 cites
- 4135US2003235787A1Low viscosity high resolution patterning materialFiled 2002·Application pending·0 cites
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