Inventor

YAO HUIRONG

US22 patents

⚠️ This page may combine multiple inventors who share the name “YAO HUIRONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YAO HUIRONG

YAO HUIRONG

Antireflective coating compositions

Underlayer composition and process thereof

Underlayer coating composition and processes thereof

Stable metal compounds, their compositions and methods

Stable metal compounds as hardmasks and filling materials, their compositions and methods of use

Antireflective compositions and methods of using same

Antireflective coating compositions

Antireflective composition for photoresists

Antireflective coating composition and process thereof

Antireflective compositions and methods of using same

AZ ELECTRONIC MATERIALS USA

Antireflective composition for photoresists

Antireflective coating composition and process thereof

Organic bottom antireflective polymer compositions

Bottom antireflective coatings

AZ ELECTRONIC MAT (LUXEMBOURG) S A R L

Metal hardmask composition and processes for forming fine patterns on semiconductor substrates

Spin coatable metallic hard mask compositions and processes thereof

Polyoxometalate and heteropolyoxometalate compositions and methods for their use

RAHMAN M DALIL

Spin-on compositions of soluble metal oxide carboxylates and methods of their use

Antireflective coating composition and process thereof

MERCK PATENT GMBH

Spin-on inorganic oxide containing composition useful as hard masks and filling materials with improved thermal stability

AZ ELECTRONIC MAT LUXEMBOURG SARL

Materials containing metal oxides, processes for making same, and processes for using same

RIDGEFIELD ACQUISITION

Composition of spin-on materials containing metal oxide nanoparticles and an organic polymer