Inventor
Lin Po Shun
TW5 patents
Patents
5 patentsUS9793183B1Oct 17, 2017
System and method for measuring and improving overlay using electronic microscopic imaging and digital processing
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations79
US10790177B2Sep 29, 2020
Systems, devices, and methods for using a real time environment sensor in a FOUP
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations65
US11171026B2Nov 9, 2021
Systems, devices, and methods for using a real time environment sensor in a FOUP
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54
US10734294B2Aug 4, 2020
System and method for measuring and improving overlay using electronic microscopic imaging and digital processing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US10424519B2Sep 24, 2019
System and method for measuring and improving overlay using electronic microscopic imaging and digital processing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47