Inventor

MATSUMOTO TAKAHIRO

JP176 patents

⚠️ This page may combine multiple inventors who share the name “MATSUMOTO TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUMOTO TAKAHIRO

CANON KK

Lithography system and method of manufacturing devices using the lithography system

Position detecting system and device manufacturing method using the same

Positional deviation detecting method and device manufacturing method using the same

Exposure apparatus and method

Apparatus and method for detecting the relative positional deviation between two diffraction gratings

System and method for detecting the relative positional deviation between diffraction gratings and for measuring the width of a line constituting a diffraction grating

Position detecting device and position detecting method

Management system, apparatus, and method, exposure apparatus, and control method therefor

Management system and apparatus, method therefor, and device manufacturing method

Positional deviation detecting method and device manufacturing method using the same

Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory

Exposure apparatus and device manufacturing method using same

Measuring method and apparatus for measuring system having measurement error changeable with time

Displacement measuring method and apparatus using plural light beam beat frequency signals

Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object

Apparatus for detecting positional deviation of diffraction gratings on a substrate by utilizing optical heterodyne interference of light beams incident on the gratings from first and second light emitters

Apparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizes

Method and apparatus for measuring positional deviation while correcting an error on the basis of the error detection by an error detecting means

Apparatus for detecting misalignment between diffraction gratings and the position of a diffraction grating based on the phases or the phase difference between electrical signals

Optical heterodyne interference measuring apparatus and method, and exposing apparatus and device manufacturing method using the same, in which a phase difference between beat signals is detected

Position detector for detecting the position of an object using a diffraction grating positioned at an angle

Measuring method and measuring apparatus

Interferometer, lithography apparatus, and method of manufacturing article

Imprint method, imprint apparatus, and article manufacturing method

Position detection apparatus and exposure apparatus

Position detecting method and apparatus

Position detecting device and position detecting method

MITSUBISHI ELECTRIC CORP

Superconductive magnet

Cold accumulation type refrigerating machine

Superconducting magnet and method for assembling the same

Cryostat

Superconducting magnet apparatus for MRI

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

High frequency heating apparatus utilizing inverter power supply

High-frequency heating apparatus using frequency-converter-type power supply

High-frequency heating apparatus having start control device for magnetron power supply circuit

Electric cooking apparatus adapted for generating high power output containing a battery

High frequency heating apparatus utilizing an inverter power supply

TAKEDA PHARMACEUTICALS CO

Substituted piperidine compound and use thereof

Substituted piperidine compound and use thereof

Substituted piperidine compound and use thereof

Substituted piperidine compound and use thereof

MITSUBISHI HEAVY IND LTD

Hydrogen separation member

Twin drum type continuous casting apparatus and method

TAKEDA PHARMACEUTICAL

Amide compound

Pyrrolopyridine derivative and use thereof

HITACHI LTD

Depth-of-field control apparatus and image pickup apparatus having the same therein

MITSUBISHI GAS CHEMICAL CO

Anti-ferroelectric liquid crystal composition and liquid crystal display

NIPPON STEEL CORP

Light emitting element with employment of porous silicon and optical device utilizing light emitting element

HARUMOTO YOSHINOBU

Gas-insulated electrical apparatus

MORIC KK

Insulator for armature of dynamo-electric machine