Imprint method, imprint apparatus, and article manufacturing method

Abstract

An imprint method of transferring a pattern formed on a mold onto a resin on a substrate. The substrate is held on a holding surface by suction. A shape of a substrate-side pattern area pre-existing on the substrate is deformed. A resin on the pattern area is brought in contact with the mold. Positions of the pattern of the mold and of the pattern area are adjusted. The resin is cured and the mold is released from the resin in contact with the mold. A deformation force, which is greater than a maximum static frictional force acting between a rear surface of the substrate corresponding to the pattern area and the holding surface, is applied to the substrate. A suction force acting on the rear surface of the substrate corresponding to the pattern area in deforming is less than a suction force acting on the substrate in adjusting.

What is claimed is: 
     
       1. An imprint method of transferring a pattern formed on a mold onto a resin on a substrate, the method comprising:
 holding, in a holding step, the substrate on a holding surface by suction; 
 deforming, in a deforming step, a shape of a substrate-side pattern area pre-existing on the substrate; 
 bringing, in a contacting step, a resin on the substrate-side pattern area of the substrate in contact with the mold; 
 adjusting, in an adjusting step, a position of the pattern of the mold and a position of the substrate-side pattern area; 
 curing, in a curing step, the resin; and 
 releasing, in a mold-releasing step, the mold from the resin in contact with the mold, 
 wherein, in the deforming step, a deformation force, which is greater than a maximum static frictional force acting between a rear surface of the substrate corresponding to the substrate-side pattern area and the holding surface, is applied to the substrate in a direction along the surface thereof, and 
 a suction force acting on the rear surface of the substrate corresponding to the substrate-side pattern area in the deforming step is less than a suction force acting on the rear surface of the substrate corresponding to the substrate-side pattern area in the adjusting step. 
 
     
     
       2. The imprint method according to  claim 1 , wherein a suction force acting on the rear surface of the substrate corresponding to the substrate-side pattern area is decreased one of (i) prior to the deforming step and (ii) during the deforming step. 
     
     
       3. The imprint method according to  claim 1 , wherein a suction force acting on the rear surface of the substrate corresponding to the substrate-side pattern area is increased after the deforming step and prior to the adjusting step. 
     
     
       4. The imprint method according to  claim 1 , wherein the substrate-side pattern area is heated in the deforming step. 
     
     
       5. The imprint method according to  claim 1 , further comprising:
 acquiring, in an acquiring step, information regarding the shape of the substrate-side pattern area by detecting positions of a plurality of marks formed on the substrate, 
 wherein, in the deforming step, the shape of the substrate-side pattern area is deformed based on information acquired in the acquiring step, so as to reduce a difference between the shape of the substrate-side pattern area and a shape of the pattern formed on the mold. 
 
     
     
       6. The imprint method according to  claim 1 , further comprising deforming, in a mold deforming step, a shape of the pattern of the mold where the pattern is formed. 
     
     
       7. The imprint method according to  claim 6 , further comprising:
 acquiring, in an acquiring step, information regarding a difference between the shape of the substrate-side pattern area and a shape of the pattern formed on the mold by detecting positions of a plurality of marks formed on the substrate and positions of a plurality of marks formed on the mold, 
 wherein, in the deforming step and the mold deforming step, the shape of the substrate-side pattern area and the shape of the pattern formed on the mold are deformed based on information acquired in the acquiring step, so as to reduce the difference therebetween.