Inventor · disambiguated record
Takahiro Matsumoto
Also filed as: MATSUMOTO TAKAHIRO
175 granted patents·23 pending applications·2,465 citations·filing 1984–2025
99Inventor score
Files withCANON KK65MATSUMOTO TAKAHIRO22MITSUBISHI GAS CHEMICAL CO18MATSUSHITA ELECTRIC INDUSTRIAL CO LTD14MITSUBISHI ELECTRIC CORP11
Top patents by PatentIndex Score
198 records- 0197US10287305B2Substituted piperidine compound and use thereofTAKEDA PHARMACEUTICALS CO·Filed 2017·Granted May 14, 2019·19 cites·3 claims
- 0296US10898737B2Substituted piperidine compound and use thereofTAKEDA PHARMACEUTICALS CO·Filed 2019·Granted Jan 26, 2021·10 cites·1 claims
- 0396US10508083B2Substituted piperidine compound and use thereofTAKEDA PHARMACEUTICALS CO·Filed 2017·Granted Dec 17, 2019·15 cites·1 claims
- 0496US6304318B1Lithography system and method of manufacturing devices using the lithography systemCANON KK·Filed 1999·Granted Oct 16, 2001·168 cites·20 claims
- 0594US5282045ADepth-of-field control apparatus and image pickup apparatus having the same thereinHITACHI LTD·Filed 1991·Granted Jan 25, 1994·183 cites·6 claims
- 0693US11292766B2Substituted piperidine compound and use thereofTAKEDA PHARMACEUTICALS CO·Filed 2019·Granted Apr 5, 2022·6 cites·10 claims
- 0793US6421124B1Position detecting system and device manufacturing method using the sameCANON KK·Filed 1998·Granted Jul 16, 2002·106 cites·20 claims
- 0892US7103497B2Position detecting device and position detecting methodCANON KK·Filed 2005·Granted Sep 5, 2006·12 cites·3 claims
- 0992US5782960AHydrogen separation memberMITSUBISHI HEAVY IND LTD·Filed 1997·Granted Jul 21, 1998·123 cites·17 claims
- 1091US5625453ASystem and method for detecting the relative positional deviation between diffraction gratings and for measuring the width of a line constituting a diffraction gratingCANON KK·Filed 1994·Granted Apr 29, 1997·93 cites·24 claims
- 1190US9952440B2Imprint apparatus, illumination optical system, and article manufacturing methodCANON KK·Filed 2015·Granted Apr 24, 2018·4 cites·14 claims
- 1290US7528966B2Position detection apparatus and exposure apparatusCANON KK·Filed 2007·Granted May 5, 2009·11 cites·10 claims
- 1390US6559924B2Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factoryCANON KK·Filed 2001·Granted May 6, 2003·37 cites·13 claims
- 1489US9711255B2Ultraviolet-emitting material and ultraviolet light sourceSTANLEY ELECTRIC CO LTD·Filed 2016·Granted Jul 18, 2017·4 cites·18 claims
- 1589US9625836B2Interferometer, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2014·Granted Apr 18, 2017·10 cites·19 claims
- 1689US6151120AExposure apparatus and methodCANON KK·Filed 1998·Granted Nov 21, 2000·74 cites·33 claims
- 1789US5465148AApparatus and method for detecting the relative positional deviation between two diffraction gratingsCANON KK·Filed 1993·Granted Nov 7, 1995·59 cites·16 claims
- 1888US7851473B2Amide compoundTAKEDA PHARMACEUTICAL·Filed 2005·Granted Dec 14, 2010·16 cites·15 claims
- 1988US6649923B2Positional deviation detecting method and device manufacturing method using the sameCANON KK·Filed 2001·Granted Nov 18, 2003·27 cites·9 claims
- 2087US11319286B2Heterocyclic compound and application thereofTAKEDA PHARMACEUTICALS CO·Filed 2018·Granted May 3, 2022·4 cites·10 claims
- 2187US9201298B2Imprint method, imprint apparatus, and article manufacturing methodCANON KK·Filed 2012·Granted Dec 1, 2015·6 cites·7 claims
- 2287US7385700B2Management system, apparatus, and method, exposure apparatus, and control method thereforCANON KK·Filed 2005·Granted Jun 10, 2008·8 cites·20 claims
- 2386US8487285B2Deep-ultraviolet light source capable of stopping leakage of harmful X-raysMATSUMOTO TAKAHIRO·Filed 2012·Granted Jul 16, 2013·6 cites·10 claims
- 2486US5369486APosition detector for detecting the position of an object using a diffraction grating positioned at an angleCANON KK·Filed 1992·Granted Nov 29, 1994·51 cites·7 claims
- 2586US5285078ALight emitting element with employment of porous silicon and optical device utilizing light emitting elementNIPPON STEEL CORP·Filed 1993·Granted Feb 8, 1994·81 cites·38 claims
- 2685US6992767B2Management system, apparatus, and method, exposure apparatus, and control method thereforCANON KK·Filed 2003·Granted Jan 31, 2006·21 cites·29 claims
- 2785US5559598AApparatus for detecting misalignment between diffraction gratings and the position of a diffraction grating based on the phases or the phase difference between electrical signalsCANON KK·Filed 1994·Granted Sep 24, 1996·48 cites·9 claims
- 2884US12281073B2Substituted piperidine compound and use thereofTAKEDA PHARMACEUTICALS CO·Filed 2023·Granted Apr 22, 2025·0 cites·20 claims
- 2984US4977301AHigh-frequency heating apparatus using frequency-converter-type power supplyMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1989·Granted Dec 11, 1990·43 cites·10 claims
- 3083US6285033B1Positional deviation detecting method and device manufacturing method using the sameCANON KK·Filed 1998·Granted Sep 4, 2001·45 cites·14 claims
- 3182US10761316B2Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing articleCANON KK·Filed 2017·Granted Sep 1, 2020·2 cites·13 claims
- 3282US5610718AApparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizesCANON KK·Filed 1994·Granted Mar 11, 1997·40 cites·9 claims
- 3382US5560421ATwin drum type continuous casting apparatus and methodMITSUBISHI HEAVY IND LTD·Filed 1995·Granted Oct 1, 1996·20 cites·9 claims
- 3481US7382134B2Superconducting magnet apparatus for MRIMITSUBISHI ELECTRIC CORP·Filed 2005·Granted Jun 3, 2008·11 cites·16 claims
- 3581US5432603AOptical heterodyne interference measuring apparatus and method, and exposing apparatus and device manufacturing method using the same, in which a phase difference between beat signals is detectedCANON KK·Filed 1993·Granted Jul 11, 1995·36 cites·13 claims
- 3680US9467088B2Power generation device, thermal power generation method and solar power generation methodMATSUMOTO TAKAHIRO·Filed 2011·Granted Oct 11, 2016·2 cites·3 claims
- 3780US7582651B2Pyrrolopyridine derivative and use thereofTAKEDA PHARMACEUTICAL·Filed 2003·Granted Sep 1, 2009·15 cites·8 claims
- 3880US6999893B2Position detecting device and position detecting methodCANON KK·Filed 2003·Granted Feb 14, 2006·14 cites·1 claims
- 3980US4581477AGas-insulated electrical apparatusHARUMOTO YOSHINOBU·Filed 1984·Granted Apr 8, 1986·28 cites·7 claims
- 4079US7812025B2Brain/neuronal cell-protecting agent and therapeutic agent for sleep disorderTAKEDA PHARMACEUTICAL·Filed 2006·Granted Oct 12, 2010·5 cites·11 claims
- 4179US6785583B2Management system and apparatus, method therefor, and device manufacturing methodCANON KK·Filed 2003·Granted Aug 31, 2004·19 cites·28 claims
- 4279US5268547AHigh frequency heating apparatus utilizing inverter power supplyMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1991·Granted Dec 7, 1993·32 cites·7 claims
- 4377US7643961B2Position detecting device and position detecting methodCANON KK·Filed 2006·Granted Jan 5, 2010·3 cites·14 claims
- 4477US7229566B2Position detecting method and apparatusCANON KK·Filed 2003·Granted Jun 12, 2007·15 cites·8 claims
- 4577US7190760B2Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatusCANON KK·Filed 2006·Granted Mar 13, 2007·3 cites·6 claims
- 4676US5235818ACryostatMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Aug 17, 1993·41 cites·7 claims
- 4775US6911468B2Tyrosine phosphatase inhibitorsTAKEDA CHEMICAL INDUSTRIES LTD·Filed 2001·Granted Jun 28, 2005·7 cites·10 claims
- 4875US6344892B1Exposure apparatus and device manufacturing method using sameCANON KK·Filed 1999·Granted Feb 5, 2002·34 cites·22 claims
- 4975US5818588ADisplacement measuring method and apparatus using plural light beam beat frequency signalsCANON KK·Filed 1997·Granted Oct 6, 1998·33 cites·6 claims
- 5075US5751426APositional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same objectCANON KK·Filed 1995·Granted May 12, 1998·37 cites·14 claims
Showing the top 50 of 198 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →