Inventor · disambiguated record
Noriyasu Hasegawa
Also filed as: HASEGAWA NORIYASU
64 granted patents·15 pending applications·489 citations·filing 1994–2025
98Inventor score
Top patents by PatentIndex Score
79 records- 0195US6721031B2Exposure apparatusCANON KK·Filed 2002·Granted Apr 13, 2004·52 cites·41 claims
- 0294US9594301B2Imprint apparatus and article manufacturing method using sameCANON KK·Filed 2012·Granted Mar 14, 2017·11 cites·15 claims
- 0391US10095117B2Imprint apparatusCANON KK·Filed 2016·Granted Oct 9, 2018·4 cites·18 claims
- 0490US11249394B2Imprint methods for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methodsCANON KK·Filed 2020·Granted Feb 15, 2022·2 cites·18 claims
- 0589US7705966B2Immersion exposure apparatusCANON KK·Filed 2007·Granted Apr 27, 2010·13 cites·10 claims
- 0689US7423724B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Sep 9, 2008·11 cites·19 claims
- 0788US6954255B2Exposure apparatusCANON KK·Filed 2002·Granted Oct 11, 2005·30 cites·19 claims
- 0888US6424405B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2001·Granted Jul 23, 2002·26 cites·20 claims
- 0987US9285675B2Imprint apparatusHAMAYA ZENICHI·Filed 2012·Granted Mar 15, 2016·6 cites·16 claims
- 1087US9201298B2Imprint method, imprint apparatus, and article manufacturing methodCANON KK·Filed 2012·Granted Dec 1, 2015·6 cites·7 claims
- 1187US6721032B2Exposure apparatus and control method therefor, and device manufacturing methodCANON KK·Filed 2002·Granted Apr 13, 2004·24 cites·25 claims
- 1287US5898477AExposure apparatus and method of manufacturing a device using the sameCANON KK·Filed 1997·Granted Apr 27, 1999·63 cites·39 claims
- 1386US10421283B2Ejection material receiving unit, ejection material ejecting apparatus, and manufacturing method of flexible memberCANON KK·Filed 2018·Granted Sep 24, 2019·2 cites·20 claims
- 1486US7907251B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Mar 15, 2011·8 cites·12 claims
- 1585US8678808B2Imprint apparatus and article manufacturing methodYOSHIDA SETSUO·Filed 2011·Granted Mar 25, 2014·6 cites·23 claims
- 1685US7394522B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2007·Granted Jul 1, 2008·12 cites·15 claims
- 1785US7123343B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Oct 17, 2006·6 cites·11 claims
- 1883US10663858B2Imprint apparatus that forms a pattern of an imprint material on a substrate-side pattern region of a substrate using a mold, and related methodsCANON KK·Filed 2017·Granted May 26, 2020·2 cites·10 claims
- 1983US9400426B2Imprint apparatusHAMAYA ZENICHI·Filed 2012·Granted Jul 26, 2016·5 cites·9 claims
- 2082US12468221B2Imprint apparatus for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methodsCANON KK·Filed 2022·Granted Nov 11, 2025·0 cites·23 claims
- 2181US5914773AExposure apparatus and method using pulsed light and changing means to control both the light intensity and light emission timingCANON KK·Filed 1996·Granted Jun 22, 1999·46 cites·21 claims
- 2280US11535039B2Ejection-material ejection apparatus and imprinting apparatusCANON KK·Filed 2018·Granted Dec 27, 2022·1 cites·20 claims
- 2379US11097545B2Liquid ejection device, cleaning apparatus and cleaning method for module substrateCANON KK·Filed 2019·Granted Aug 24, 2021·1 cites·16 claims
- 2479US10513125B2Fluid containing memberCANON KK·Filed 2018·Granted Dec 24, 2019·1 cites·20 claims
- 2579US7221432B2Exposure apparatusCANON KK·Filed 2005·Granted May 22, 2007·4 cites·9 claims
- 2679US7050152B2Exposure apparatusCANON KK·Filed 2004·Granted May 23, 2006·16 cites·18 claims
- 2779US2025172868A1Imprint methods for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methodsCANON KK·Filed 2025·Application pending·0 cites
- 2877US9851634B2Imprint apparatusCANON KK·Filed 2013·Granted Dec 26, 2017·3 cites·11 claims
- 2977US7738076B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Jun 15, 2010·3 cites·5 claims
- 3076US5883701AScanning projection exposure method and apparatusCANON KK·Filed 1996·Granted Mar 16, 1999·37 cites·70 claims
- 3172US11187979B2Imprint apparatus, imprint method, and article manufacturing methodCANON KK·Filed 2019·Granted Nov 30, 2021·1 cites·14 claims
- 3272US9892949B2Imprint method, imprint apparatus, and article manufacturing methodCANON KK·Filed 2016·Granted Feb 13, 2018·1 cites·18 claims
- 3370US6204911B1Exposure apparatus and device manufacturing methodCANON KK·Filed 1996·Granted Mar 20, 2001·26 cites·40 claims
- 3469US2025362242A1Inspection method, inspection apparatus, imprint apparatus, article manufacturing method, method of manufacturing replica mold, and moldCANON KK·Filed 2025·Application pending·0 cites
- 3568US9523926B2Exposure apparatus and device manufacturing methodUMEMURA ATSUSHI·Filed 2012·Granted Dec 20, 2016·2 cites·15 claims
- 3668US7330236B2Exposure apparatus, and device manufacturing method using the sameCANON KK·Filed 2004·Granted Feb 12, 2008·9 cites·10 claims
- 3767US9958773B2Imprint apparatus and method of manufacturing articleCANON KK·Filed 2015·Granted May 1, 2018·1 cites·14 claims
- 3867US6934003B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2002·Granted Aug 23, 2005·6 cites·56 claims
- 3966US5847974AMeasuring method and apparatus for measuring system having measurement error changeable with timeCANON KK·Filed 1995·Granted Dec 8, 1998·24 cites·6 claims
- 4066US2024198679A1Liquid ejecting apparatus, imprint apparatus, and control methodCANON KK·Filed 2023·Application pending·0 cites
- 4164US12257842B2Liquid discharge apparatus, imprint apparatus, and cleaning methodCANON KK·Filed 2022·Granted Mar 25, 2025·0 cites·18 claims
- 4264US11749971B1Metallic shell for spark plug and spark plug using the sameNGK SPARK PLUG CO·Filed 2023·Granted Sep 5, 2023·0 cites·8 claims
- 4363US12441122B2Liquid discharge apparatus and imprint apparatusCANON KK·Filed 2023·Granted Oct 14, 2025·0 cites·30 claims
- 4463US9234738B2Rotation-angle detection deviceASANO TAKUMI·Filed 2010·Granted Jan 12, 2016·3 cites·4 claims
- 4563US2024393678A1Removing method, removal apparatus, imprint apparatus, replica manufacturing apparatus, and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 4660US11465350B2Ejection device, imprint apparatus, and detection methodCANON KK·Filed 2020·Granted Oct 11, 2022·0 cites·17 claims
- 4760US11267252B2Ejection apparatus and imprint apparatusCANON KK·Filed 2020·Granted Mar 8, 2022·0 cites·18 claims
- 4859US12070951B2Liquid discharge apparatus, imprint apparatus, and detection methodCANON KK·Filed 2021·Granted Aug 27, 2024·0 cites·18 claims
- 4958US12083791B2Liquid discharge device and imprint apparatusCANON KK·Filed 2021·Granted Sep 10, 2024·0 cites·12 claims
- 5058US2024269903A1Liquid material, mold, forming method, forming apparatus, imprint apparatus, planarization apparatus, and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
Showing the top 50 of 79 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →