Inventor

OH HYEOK SANG

KR17 patents

⚠️ This page may combine multiple inventors who share the name “OH HYEOK SANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OH HYEOK SANG

SAMSUNG ELECTRONICS CO LTD

Method of fabricating dual damascene interconnection

Semiconductor device

Semiconductor device including via plug and method of forming the same

Methods of fabricating semiconductor device having slope at lower sides of interconnection hole with etch-stop layer

Integrated circuit device and method of manufacturing the same

Integrated circuit device and method of manufacturing the same

Semiconductor device

Integrated circuit device and method of manufacturing the same

Integrated circuit device and method of manufacturing the same

Semiconductor devices

Semiconductor devices

Methods of forming micropatterns and substrate processing apparatus

Methods of fabricating semiconductor device having slope at lower sides of interconnection hole with etch-stop layer

Methods of forming integrated circuit devices having damascene interconnects therein with metal diffusion barrier layers and devices formed thereby

OH HYEOK-SANG

Methods of forming integrated circuit devices having damascene interconnects therein with metal diffusion barrier layers and devices formed thereby

KIM JUN JUNG

Wiring structures and semiconductor devices

IBM

Interconnect structures comprising capping layers with low dielectric constants and methods of making the same