Inventor

SUGANAGA TOSHIFUMI

JP9 patents

⚠️ This page may combine multiple inventors who share the name “SUGANAGA TOSHIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

5 patents

US5776825AJul 7, 1998

Method for forming a semiconductor device having reduced stepped portions

MITSUBISHI ELECTRIC CORP11 citations72

US5539231AJul 23, 1996

Dynamic random access memory device having reduced stepped portions

MITSUBISHI ELECTRIC CORP13 citations72

US6352800B1Mar 5, 2002

Reticle for use in exposing semiconductor, method of producing the reticle, and semiconductor device

MITSUBISHI ELECTRIC CORP8 citations71

US6295629B1Sep 25, 2001

Focus correcting method and method of manufacturing semiconductor device

MITSUBISHI ELECTRIC CORP14 citations71

US6087693AJul 11, 2000

Semiconductor device with reduced stepped portions

MITSUBISHI ELECTRIC CORP0 citations40

RENESAS TECH CORP

2 patents

US7727709B2Jun 1, 2010

Method of forming resist pattern and method of manufacturing semiconductor device

RENESAS TECH CORP2 citations61

US6717652B2Apr 6, 2004

Exposure apparatus, exposure method and semiconductor device fabricated with the exposure method

RENESAS TECH CORP0 citations49

RENESAS ELECTRONICS CORP

2 patents

US10418327B2Sep 17, 2019

Semiconductor device

RENESAS ELECTRONICS CORP0 citations49

US9711344B2Jul 18, 2017

Semiconductor device manufacturing method using a multilayer resist

RENESAS ELECTRONICS CORP0 citations39