Inventor

BOHLING DAVID A

US10 patents

Patents

10 patents

US5094701AMar 10, 1992

Cleaning agents comprising beta-diketone and beta-ketoimine ligands and a process for using the same

AIR PROD & CHEM66 citations95

US5464666ANov 7, 1995

Process for chemical vapor codeposition of copper and aluminum alloys

AIR PROD & CHEM63 citations94

US5221366AJun 22, 1993

Etching agents comprising β-diketone and β-ketoimine ligands and a process for using the same

AIR PROD & CHEM36 citations92

US5213622AMay 25, 1993

Cleaning agents for fabricating integrated circuits and a process for using the same

AIR PROD & CHEM42 citations92

US5213621AMay 25, 1993

Halogenated carboxylic acid cleaning agents for fabricating integrated circuits and a process for using the same

AIR PROD & CHEM24 citations92

US5124278AJun 23, 1992

Amino replacements for arsine, antimony and phosphine

AIR PROD & CHEM78 citations92

US5028724AJul 2, 1991

Synthesis of volatile fluorinated and non-fluorinated metal-beta-ketonate and metal-beta-ketoiminato complexes

AIR PROD & CHEM38 citations92

US5332444AJul 26, 1994

Gas phase cleaning agents for removing metal containing contaminants from integrated circuit assemblies and a process for using the same

AIR PROD & CHEM38 citations91

US4988640AJan 29, 1991

Method of doping and implanting using arsine, antimony, and phosphine substitutes

AIR PROD & CHEM24 citations91

US4904616AFeb 27, 1990

Method of depositing arsine, antimony and phosphine substitutes

AIR PROD & CHEM34 citations91