Inventor · disambiguated record
Miyoko Kawashima
Also filed as: KAWASHIMA MIYOKO
30 granted patents·5 pending applications·372 citations·filing 1999–2015
97Inventor score
Top patents by PatentIndex Score
35 records- 0194US7009686B2Exposure methodCANON KK·Filed 2003·Granted Mar 7, 2006·60 cites·8 claims
- 0293US7126667B2Exposure apparatus and methodCANON KK·Filed 2006·Granted Oct 24, 2006·17 cites·1 claims
- 0391US6534242B2Multiple exposure device formationCANON KK·Filed 2001·Granted Mar 18, 2003·41 cites·104 claims
- 0491US6351304B1Multiple exposure methodCANON KK·Filed 2000·Granted Feb 26, 2002·42 cites·36 claims
- 0589US7547502B2Exposure methodCANON KK·Filed 2006·Granted Jun 16, 2009·11 cites·11 claims
- 0689US6992750B2Exposure apparatus and methodCANON KK·Filed 2003·Granted Jan 31, 2006·36 cites·5 claims
- 0786US6780574B2Multiple exposure methodCANON KK·Filed 2001·Granted Aug 24, 2004·27 cites·33 claims
- 0884US6930754B1Multiple exposure methodCANON KK·Filed 1999·Granted Aug 16, 2005·40 cites·28 claims
- 0983US7947433B2Exposure methodCANON KK·Filed 2009·Granted May 24, 2011·5 cites·2 claims
- 1082US8365106B2Method for optimization of light effective source while target pattern is changedCANON KK·Filed 2009·Granted Jan 29, 2013·6 cites·8 claims
- 1179US7592130B2Exposure methodCANON KK·Filed 2006·Granted Sep 22, 2009·4 cites·7 claims
- 1278US8352892B2Method, computer-readable storage medium, and apparatus for generating a mask data and fabricating processCANON KK·Filed 2011·Granted Jan 8, 2013·3 cites·11 claims
- 1378US8144967B2Mask data generation method, mask fabrication method, exposure method, device fabrication method, and storage mediumKAWASHIMA MIYOKO·Filed 2008·Granted Mar 27, 2012·5 cites·14 claims
- 1478US7046337B2Exposure apparatus and methodCANON KK·Filed 2005·Granted May 16, 2006·4 cites·8 claims
- 1577US8502962B2Computer readable storage medium including effective light source calculation program, and exposure methodKAWASHIMA MIYOKO·Filed 2010·Granted Aug 6, 2013·3 cites·11 claims
- 1677US6654101B2Exposure apparatus and device manufacturing method including changing a photo-intensity distribution of a light source and adjusting an illuminance distribution on a substrate in accordance with the changeCANON KK·Filed 2001·Granted Nov 25, 2003·10 cites·14 claims
- 1774US6403291B1Multiple exposure methodCANON KK·Filed 1999·Granted Jun 11, 2002·33 cites·35 claims
- 1872US8247141B2Method of generating reticle data, memory medium storing program for generating reticle data and method of producing reticleHIGAKI YOSHINARI·Filed 2010·Granted Aug 21, 2012·2 cites·9 claims
- 1971US9329376B2Imaging apparatusHIGAKI YOSHINARI·Filed 2012·Granted May 3, 2016·2 cites·14 claims
- 2071US8234600B2Computer readable storage medium storing program for generating reticle data, and method of generating reticle dataKAWASHIMA MIYOKO·Filed 2010·Granted Jul 31, 2012·3 cites·9 claims
- 2170US7402378B2Exposure method and apparatusCANON KK·Filed 2005·Granted Jul 22, 2008·2 cites·8 claims
- 2270US7023522B2Multiple exposure methodCANON KK·Filed 2004·Granted Apr 4, 2006·7 cites·61 claims
- 2365US9386210B2Imaging apparatusKAWASHIMA MIYOKO·Filed 2012·Granted Jul 5, 2016·1 cites·14 claims
- 2464US7846625B2Phase shift maskCANON KK·Filed 2008·Granted Dec 7, 2010·1 cites·9 claims
- 2563US9292925B2Imaging system and control method thereofKAWASHIMA MIYOKO·Filed 2012·Granted Mar 22, 2016·1 cites·21 claims
- 2658US6991896B2Exposure methodCANON KK·Filed 2003·Granted Jan 31, 2006·4 cites·5 claims
- 2753US7505112B2Multiple exposure methodCANON KK·Filed 2005·Granted Mar 17, 2009·0 cites·26 claims
- 2851US6991877B2Exposure method and apparatusCANON KK·Filed 2002·Granted Jan 31, 2006·2 cites·23 claims
- 2949US2006068331A1Exposure methodKAWASHIMA MIYOKO·Filed 2005·Application pending·0 cites
- 3045US2013314527A1Image pickup method and image pickup apparatusCANON KK·Filed 2013·Application pending·0 cites
- 3144US7518707B2Exposure apparatusCANON KK·Filed 2006·Granted Apr 14, 2009·0 cites·6 claims
- 3244US2004080736A1Imaging method for manufacture of microdevicesCANON KK·Filed 2003·Application pending·0 cites
- 3343US2006197930A1Exposure method and apparatusCANON KK·Filed 2006·Application pending·0 cites
- 3437US9377677B2Generating method, creating method, exposure method, and storage mediumKAWASHIMA MIYOKO·Filed 2010·Granted Jun 28, 2016·0 cites·8 claims
- 3536US2015293342A1Image capturing apparatus and image capturing methodCANON KK·Filed 2015·Application pending·0 cites
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