Inventor
BRUEL MICHEL
FR69 patents
⚠️ This page may combine multiple inventors who share the name “BRUEL MICHEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
COMMISSARIAT ENERGIE ATOMIQUE
42 patentsUSRE39484EFeb 6, 2007
Process for the production of thin semiconductor material films
COMMISSARIAT ENERGIE ATOMIQUE305 citations99
US7067396B2Jun 27, 2006
Method of producing a thin layer of semiconductor material
COMMISSARIAT ENERGIE ATOMIQUE309 citations99
US6946365B2Sep 20, 2005
Method for producing a thin film comprising introduction of gaseous species
COMMISSARIAT ENERGIE ATOMIQUE163 citations99
US6809009B2Oct 26, 2004
Method of producing a thin layer of semiconductor material
COMMISSARIAT ENERGIE ATOMIQUE363 citations99
US6809044B1Oct 26, 2004
Method for making a thin film using pressurization
COMMISSARIAT ENERGIE ATOMIQUE184 citations99
US6756286B1Jun 29, 2004
Method for transferring a thin film comprising a step of generating inclusions
COMMISSARIAT ENERGIE ATOMIQUE263 citations99
US6335258B1Jan 1, 2002
Method for making a thin film on a support and resulting structure including an additional thinning stage before heat treatment causes micro-cavities to separate substrate element
COMMISSARIAT ENERGIE ATOMIQUE174 citations99
US6303468B1Oct 16, 2001
Method for making a thin film of solid material
COMMISSARIAT ENERGIE ATOMIQUE271 citations99
US6225192B1May 1, 2001
Method of producing a thin layer of semiconductor material
COMMISSARIAT ENERGIE ATOMIQUE234 citations99
US6190998B1Feb 20, 2001
Method for achieving a thin film of solid material and applications of this method
COMMISSARIAT ENERGIE ATOMIQUE185 citations99
US6020252AFeb 1, 2000
Method of producing a thin layer of semiconductor material
COMMISSARIAT ENERGIE ATOMIQUE619 citations99
US5714395AFeb 3, 1998
Process for the manufacture of thin films of semiconductor material
COMMISSARIAT ENERGIE ATOMIQUE525 citations99
US5559043ASep 24, 1996
Method for placing semiconductive plates on a support
COMMISSARIAT ENERGIE ATOMIQUE237 citations99
US5494835AFeb 27, 1996
Process for the production of a relief structure on a semiconductor material support
COMMISSARIAT ENERGIE ATOMIQUE173 citations99
US5374564ADec 20, 1994
Process for the production of thin semiconductor material films
COMMISSARIAT ENERGIE ATOMIQUE1,964 citations99
US6225190B1May 1, 2001
Process for the separation of at least two elements of a structure in contact with one another by ion implantation
COMMISSARIAT ENERGIE ATOMIQUE104 citations98
US6103597AAug 15, 2000
Method of obtaining a thin film of semiconductor material
COMMISSARIAT ENERGIE ATOMIQUE399 citations98
US5993677ANov 30, 1999
Process for transferring a thin film from an initial substrate onto a final substrate
COMMISSARIAT ENERGIE ATOMIQUE194 citations98
US5863830AJan 26, 1999
Process for the production of a structure having a thin semiconductor film on a substrate
COMMISSARIAT ENERGIE ATOMIQUE193 citations98
US5804086ASep 8, 1998
Structure having cavities and process for producing such a structure
COMMISSARIAT ENERGIE ATOMIQUE136 citations98
US7498234B2Mar 3, 2009
Method of producing a thin layer of semiconductor material
COMMISSARIAT ENERGIE ATOMIQUE34 citations96
US6316333B1Nov 13, 2001
Method for obtaining a thin film in particular semiconductor, comprising a protected ion zone and involving an ion implantation
COMMISSARIAT ENERGIE ATOMIQUE76 citations96
US4536657AAug 20, 1985
Process and apparatus for obtaining beams of particles with a spatially modulated density
COMMISSARIAT ENERGIE ATOMIQUE100 citations96
US6465327B1Oct 15, 2002
Method for producing a thin membrane and resulting structure with membrane
COMMISSARIAT ENERGIE ATOMIQUE61 citations95
US4704302ANov 3, 1987
Process for producing an insulating layer buried in a semiconductor substrate by ion implantation
COMMISSARIAT ENERGIE ATOMIQUE122 citations94
US4585945AApr 29, 1986
Process and apparatus for implanting particles in a solid
COMMISSARIAT ENERGIE ATOMIQUE110 citations94
US4452644AJun 5, 1984
Process for doping semiconductors
COMMISSARIAT ENERGIE ATOMIQUE93 citations94
US7883994B2Feb 8, 2011
Process for the transfer of a thin film
COMMISSARIAT ENERGIE ATOMIQUE21 citations93
US7229899B2Jun 12, 2007
Process for the transfer of a thin film
COMMISSARIAT ENERGIE ATOMIQUE25 citations93
US6808967B1Oct 26, 2004
Method for producing a buried layer of material in another material
COMMISSARIAT ENERGIE ATOMIQUE23 citations93
US6261928B1Jul 17, 2001
Producing microstructures or nanostructures on a support
COMMISSARIAT ENERGIE ATOMIQUE35 citations93
US6059877AMay 9, 2000
Method for obtaining a wafer in semiconducting material of large dimensions and use of the resulting wafer for producing substrates of the semiconductor on insulator type
COMMISSARIAT ENERGIE ATOMIQUE32 citations93
US5985688ANov 16, 1999
Method for inserting a gaseous phase in a sealed cavity by ion implantation
COMMISSARIAT ENERGIE ATOMIQUE35 citations93
US4370176AJan 25, 1983
Process for fast droping of semiconductors
COMMISSARIAT ENERGIE ATOMIQUE29 citations93
US4368083AJan 11, 1983
Process for doping semiconductors
COMMISSARIAT ENERGIE ATOMIQUE95 citations93
US6159323ADec 12, 2000
Process for selective transfer of a microstructure formed on an initial substrate to a final substrate
COMMISSARIAT ENERGIE ATOMIQUE54 citations92
US5661333AAug 26, 1997
Substrate for integrated components comprising a thin film and an intermediate film
COMMISSARIAT ENERGIE ATOMIQUE38 citations92
US4508056AApr 2, 1985
Target holder with mechanical scanning
COMMISSARIAT ENERGIE ATOMIQUE100 citations90
US8609514B2Dec 17, 2013
Process for the transfer of a thin film comprising an inclusion creation step
COMMISSARIAT ENERGIE ATOMIQUE6 citations84
US6730208B1May 4, 2004
Chip and method for fitting out a chip comprising a plurality of electrodes
COMMISSARIAT ENERGIE ATOMIQUE8 citations74
US4564763AJan 14, 1986
Process and apparatus for varying the deflection of the path of a charged particle beam
COMMISSARIAT ENERGIE ATOMIQUE14 citations71
US4527044AJul 2, 1985
Apparatus for treating a sample by a pulsed electron beam
COMMISSARIAT ENERGIE ATOMIQUE11 citations69
SOITEC SILICON ON INSULATOR
2 patents(unassigned)
1 patentCOMMISSARIAT A L ATOMIQUE
1 patentBRUEL MICHEL
1 patentASPAR BERNARD
1 patentMORICEAU HUBERT
1 patentAPLINOV
1 patentShowing the top 50 of 69 patents by PatentIndex Score.