Inventor
SHIN CHUL-HO
KR19 patents
⚠️ This page may combine multiple inventors who share the name “SHIN CHUL-HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
13 patentsUS5399518AMar 21, 1995
Method for manufacturing a multiple walled capacitor of a semiconductor device
SAMSUNG ELECTRONICS CO LTD88 citations94
US7564042B2Jul 21, 2009
Ion beam apparatus having plasma sheath controller
SAMSUNG ELECTRONICS CO LTD18 citations92
US5200355AApr 6, 1993
Method for manufacturing a mask read only memory device
SAMSUNG ELECTRONICS CO LTD41 citations91
US8790976B2Jul 29, 2014
Method of forming semiconductor device having self-aligned plug
SAMSUNG ELECTRONICS CO LTD5 citations83
US8986554B2Mar 24, 2015
Method of forming patterns
SAMSUNG ELECTRONICS CO LTD11 citations80
US7629589B2Dec 8, 2009
Apparatus and method for controlling ion beam
SAMSUNG ELECTRONICS CO LTD7 citations73
US8900468B2Dec 2, 2014
Methods of forming a pattern
SAMSUNG ELECTRONICS CO LTD6 citations72
US5317534AMay 31, 1994
A mask read only memory device
SAMSUNG ELECTRONICS CO LTD14 citations72
US7446325B2Nov 4, 2008
Reflector for generating a neutral beam and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD4 citations62
US6855597B2Feb 15, 2005
DRAM cell
SAMSUNG ELECTRONICS CO LTD4 citations62
US6570205B2May 27, 2003
DRAM cell
SAMSUNG ELECTRONICS CO LTD5 citations62
US8946089B2Feb 3, 2015
Methods of forming contact holes
SAMSUNG ELECTRONICS CO LTD1 citations51
US6391714B2May 21, 2002
Method for fabricating a capacitor in a semiconductor memory device
SAMSUNG ELECTRONICS CO LTD0 citations41