Inventor · disambiguated record

John L. Shartel, Ii

Also filed as: SHARTEL II JOHN L

1 granted patent·1 citations·filing 2003–2003

16Inventor score

Technology areasB08B

Files withNOVELLUS SYSTEMS INC1

Top patents by PatentIndex Score

1 record

0141US6875087B2Method for chemical mechanical planarization (CMP) and chemical mechanical cleaning (CMC) of a work pieceNOVELLUS SYSTEMS INC·Filed 2003·Granted Apr 5, 2005·1 cites·19 claims

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