Inventor
HIROSAKI TAKAKO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “HIROSAKI TAKAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
9 patentsUS6406829B1Jun 18, 2002
Negative-working photoresist composition
TOKYO OHKA KOGYO CO LTD44 citations92
US6284428B1Sep 4, 2001
Undercoating composition for photolithographic resist
TOKYO OHKA KOGYO CO LTD29 citations92
US6544717B2Apr 8, 2003
Undercoating composition for photolithographic resist
TOKYO OHKA KOGYO CO LTD14 citations84
US6455228B1Sep 24, 2002
Multilayered body for photolithographic patterning
TOKYO OHKA KOGYO CO LTD13 citations73
US6297174B2Oct 2, 2001
Method for the formation of a planarizing coating film on substrate surface
TOKYO OHKA KOGYO CO LTD7 citations73
US7033731B2Apr 25, 2006
Multilayered body for photolithographic patterning
TOKYO OHKA KOGYO CO LTD0 citations51
US6864036B2Mar 8, 2005
Negative-working photoresist composition
TOKYO OHKA KOGYO CO LTD1 citations51
US7981588B2Jul 19, 2011
Negative resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations41
US7871753B2Jan 18, 2011
Positive resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations41
SAWANO ATSUSHI
2 patentsUS8158328B2Apr 17, 2012
Composition for formation of anti-reflection film, and method for formation of resist pattern using the same
SAWANO ATSUSHI2 citations57
US8455182B2Jun 4, 2013
Composition for antireflection film formation and method for resist pattern formation using the composition
SAWANO ATSUSHI0 citations36