Inventor · disambiguated record

Min-Sub Han

Also filed as: HAN MIN-SUB

3 granted patents·1 pending application·32 citations·filing 2000–2021

63Inventor score

Technology areasG03F G05B H10W

Files withASML NETHERLANDS BV3 HYUNDAI ELECTRONICS IND1

Top patents by PatentIndex Score

4 records

0185US12044981B2Method and apparatus for optimization of lithographic processASML NETHERLANDS BV·Filed 2021·Granted Jul 23, 2024·1 cites·20 claims
0275US6372649B1Method for forming multi-level metal interconnectionHYUNDAI ELECTRONICS IND·Filed 2000·Granted Apr 16, 2002·31 cites·13 claims
0358US11099487B2Method and apparatus for optimization of lithographic processASML NETHERLANDS BV·Filed 2018·Granted Aug 24, 2021·0 cites·21 claims
0440US2020050180A1Methods & apparatus for controlling an industrial processASML NETHERLANDS BV·Filed 2017·Application pending·0 cites

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →