Inventor · disambiguated record
Eiji Kikama
Also filed as: KIKAMA EIJI
8 granted patents·14 citations·filing 2011–2022
76Inventor score
Top patents by PatentIndex Score
8 records- 0193US8338312B2Film formation method, film formation apparatus, and method for using film formation apparatusSATO JUN·Filed 2011·Granted Dec 25, 2012·12 cites·18 claims
- 0270US10964530B2Method of forming blocking silicon oxide film, and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted Mar 30, 2021·1 cites·10 claims
- 0369US10553686B2Method and apparatus for forming silicon oxide film, and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted Feb 4, 2020·1 cites·16 claims
- 0456US12438055B2Abnormality detection method and processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Oct 7, 2025·0 cites·9 claims
- 0549US10781515B2Film-forming method and film-forming apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Sep 22, 2020·0 cites·11 claims
- 0643US11567485B2Substrate processing system and method for monitoring process dataTOKYO ELECTRON LTD·Filed 2020·Granted Jan 31, 2023·0 cites·9 claims
- 0742US10968515B2Vertical heat treatment apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Apr 6, 2021·0 cites·8 claims
- 0841US11725284B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Aug 15, 2023·0 cites·12 claims
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