Inventor · disambiguated record
Stefan Cornelis Theodorus Van Der Sanden
Also filed as: VAN DER SANDEN STEFAN CORNELIS THEODORUS
12 granted patents·3 pending applications·38 citations·filing 2012–2023
87Inventor score
Top patents by PatentIndex Score
15 records- 0196US10437163B2Method and apparatus for design of a metrology targetASML NETHERLANDS BV·Filed 2017·Granted Oct 8, 2019·7 cites·9 claims
- 0292US9291916B2Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methodsASML NETHERLANDS BV·Filed 2015·Granted Mar 22, 2016·5 cites·12 claims
- 0392US8976355B2Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methodsVAN DER SANDEN STEFAN CORNELIS THEODORUS·Filed 2012·Granted Mar 10, 2015·19 cites·8 claims
- 0481US11782349B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2023·Granted Oct 10, 2023·0 cites·20 claims
- 0581US10025193B2Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program productASML NETHERLANDS BV·Filed 2014·Granted Jul 17, 2018·3 cites·20 claims
- 0677US11592753B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2022·Granted Feb 28, 2023·0 cites·20 claims
- 0777US10877381B2Methods of determining corrections for a patterning processASML NETHERLANDS BV·Filed 2017·Granted Dec 29, 2020·1 cites·20 claims
- 0874US11493851B2Lithographic method and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Nov 8, 2022·0 cites·20 claims
- 0974US9753377B2Deformation pattern recognition method, pattern transferring method, processing device monitoring method, and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Sep 5, 2017·2 cites·14 claims
- 1073US11156923B2Lithographic method and lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 26, 2021·1 cites·20 claims
- 1172US11327407B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted May 10, 2022·0 cites·20 claims
- 1267US11003099B2Method and apparatus for design of a metrology targetASML NETHERLANDS BV·Filed 2019·Granted May 11, 2021·0 cites·20 claims
- 1355US2025147436A1Methods of metrologyASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1449US2024004309A1A method of monitoring a lithographic processASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1537US2012218533A1Method of calculating model parameters of a substrate, a lithographic apparatus and an apparatus for controlling lithographic processing by a lithographic apparatusLYULINA IRINA·Filed 2012·Application pending·0 cites
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