Inventor
WATTS MICHAEL P C
US45 patents
⚠️ This page may combine multiple inventors who share the name “WATTS MICHAEL P C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOLECULAR IMPRINTS INC
29 patentsUS7140861B2Nov 28, 2006
Compliant hard template for UV imprinting
MOLECULAR IMPRINTS INC132 citations99
US7077992B2Jul 18, 2006
Step and repeat imprint lithography processes
MOLECULAR IMPRINTS INC302 citations99
US7070405B2Jul 4, 2006
Alignment systems for imprint lithography
MOLECULAR IMPRINTS INC214 citations99
US6936194B2Aug 30, 2005
Functional patterning material for imprint lithography processes
MOLECULAR IMPRINTS INC270 citations99
US6916584B2Jul 12, 2005
Alignment methods for imprint lithography
MOLECULAR IMPRINTS INC227 citations99
US6900881B2May 31, 2005
Step and repeat imprint lithography systems
MOLECULAR IMPRINTS INC310 citations99
US8349241B2Jan 8, 2013
Method to arrange features on a substrate to replicate features having minimal dimensional variability
MOLECULAR IMPRINTS INC87 citations98
US7281921B2Oct 16, 2007
Scatterometry alignment for imprint lithography
MOLECULAR IMPRINTS INC59 citations98
US6980282B2Dec 27, 2005
Method for modulating shapes of substrates
MOLECULAR IMPRINTS INC73 citations98
US6932934B2Aug 23, 2005
Formation of discontinuous films during an imprint lithography process
MOLECULAR IMPRINTS INC320 citations98
US7338275B2Mar 4, 2008
Formation of discontinuous films during an imprint lithography process
MOLECULAR IMPRINTS INC117 citations97
US7019819B2Mar 28, 2006
Chucking system for modulating shapes of substrates
MOLECULAR IMPRINTS INC73 citations97
US7071088B2Jul 4, 2006
Method for fabricating bulbous-shaped vias
MOLECULAR IMPRINTS INC54 citations96
US7027156B2Apr 11, 2006
Scatterometry alignment for imprint lithography
MOLECULAR IMPRINTS INC115 citations96
US6982783B2Jan 3, 2006
Chucking system for modulating shapes of substrates
MOLECULAR IMPRINTS INC37 citations95
US7442336B2Oct 28, 2008
Capillary imprinting technique
MOLECULAR IMPRINTS INC19 citations93
US7279113B2Oct 9, 2007
Method of forming a compliant template for UV imprinting
MOLECULAR IMPRINTS INC29 citations93
US7252715B2Aug 7, 2007
System for dispensing liquids
MOLECULAR IMPRINTS INC33 citations93
US6926929B2Aug 9, 2005
System and method for dispensing liquids
MOLECULAR IMPRINTS INC42 citations93
US7906058B2Mar 15, 2011
Bifurcated contact printing technique
MOLECULAR IMPRINTS INC19 citations92
US7727453B2Jun 1, 2010
Step and repeat imprint lithography processes
MOLECULAR IMPRINTS INC22 citations92
US7224443B2May 29, 2007
Imprint lithography substrate processing tool for modulating shapes of substrates
MOLECULAR IMPRINTS INC26 citations92
US7122079B2Oct 17, 2006
Composition for an etching mask comprising a silicon-containing material
MOLECULAR IMPRINTS INC19 citations92
US7019835B2Mar 28, 2006
Method and system to measure characteristics of a film disposed on a substrate
MOLECULAR IMPRINTS INC19 citations90
US7939131B2May 10, 2011
Method to provide a layer with uniform etch characteristics
MOLECULAR IMPRINTS INC16 citations82
US7943081B2May 17, 2011
Step and repeat imprint lithography processes
MOLECULAR IMPRINTS INC2 citations63
US7906180B2Mar 15, 2011
Composition for an etching mask comprising a silicon-containing material
MOLECULAR IMPRINTS INC5 citations63
US7981481B2Jul 19, 2011
Method for controlling distribution of fluid components on a body
MOLECULAR IMPRINTS INC3 citations62
US7845931B2Dec 7, 2010
Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor
MOLECULAR IMPRINTS INC1 citations52
XU FRANK Y
2 patentsSREENIVASAN SIDLGATA V
2 patentsUNIV TEXAS
2 patentsPIXEL SYSTEMS INC
2 patentsUS5506676AApr 9, 1996
Defect detection using fourier optics and a spatial separator for simultaneous optical computing of separated fourier transform components
PIXEL SYSTEMS INC104 citations96
US5966212AOct 12, 1999
High-speed, high-resolution, large area inspection using multiple optical fourier transform cells
PIXEL SYSTEMS INC42 citations89