Inventor · disambiguated record
Tomonao Kuwada
Also filed as: KUWADA TOMONAO
3 granted patents·1 pending application·24 citations·filing 2001–2022
59Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
4 records- 0181US6905079B2Shower head structure and cleaning method thereofTOKYO ELECTRON LTD·Filed 2001·Granted Jun 14, 2005·24 cites·46 claims
- 0256US12512339B2Temperature control device and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Dec 30, 2025·0 cites·7 claims
- 0347US12406835B2Temperature controller, substrate processing apparatus, and pressure control methodTOKYO ELECTRON LTD·Filed 2022·Granted Sep 2, 2025·0 cites·13 claims
- 0446US2005082385A1Shower head structure and cleaning method thereofFiled 2004·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →