Inventor
CHOU CHEN CHENG
TW21 patents
⚠️ This page may combine multiple inventors who share the name “CHOU CHEN CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
11 patentsUS5817562AOct 6, 1998
Method for making improved polysilicon FET gate electrode structures and sidewall spacers for more reliable self-aligned contacts (SAC)
TAIWAN SEMICONDUCTOR MFG147 citations97
US5766992AJun 16, 1998
Process for integrating a MOSFET device, using silicon nitride spacers and a self-aligned contact structure, with a capacitor structure
TAIWAN SEMICONDUCTOR MFG60 citations95
US6348389B1Feb 19, 2002
Method of forming and etching a resist protect oxide layer including end-point etch
TAIWAN SEMICONDUCTOR MFG49 citations92
US6004841ADec 21, 1999
Fabrication process for MOSFET devices and a reproducible capacitor structure
TAIWAN SEMICONDUCTOR MFG26 citations92
US5792681AAug 11, 1998
Fabrication process for MOSFET devices and a reproducible capacitor structure
TAIWAN SEMICONDUCTOR MFG25 citations92
US5731236AMar 24, 1998
Process to integrate a self-aligned contact structure, with a capacitor structure
TAIWAN SEMICONDUCTOR MFG49 citations92
US6346449B1Feb 12, 2002
Non-distort spacer profile during subsequent processing
TAIWAN SEMICONDUCTOR MFG13 citations74
US8779572B2Jul 15, 2014
On-chip heat spreader
TAIWAN SEMICONDUCTOR MFG2 citations62
US8609506B2Dec 17, 2013
On-chip heat spreader
TAIWAN SEMICONDUCTOR MFG2 citations62
US6284611B1Sep 4, 2001
Method for salicide process using a titanium nitride barrier layer
TAIWAN SEMICONDUCTOR MFG6 citations61
US6787470B2Sep 7, 2004
Sacrificial feature for corrosion prevention during CMP
TAIWAN SEMICONDUCTOR MFG0 citations52
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS11551979B2Jan 10, 2023
Method for manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10818558B2Oct 27, 2020
Semiconductor structure having trench and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9570557B2Feb 14, 2017
Tilt implantation for STI formation in FinFET structures
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12119267B2Oct 15, 2024
Method for manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62