Inventor
MAEDA KIYOHIKO
JP35 patents
⚠️ This page may combine multiple inventors who share the name “MAEDA KIYOHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
17 patentsUSD740769SOct 13, 2015
Boat for substrate processing apparatus
HITACHI INT ELECTRIC INC23 citations92
US8043431B2Oct 25, 2011
Substrate processing apparatus and method for manufacturing a semiconductor device
HITACHI INT ELECTRIC INC16 citations91
US7494941B2Feb 24, 2009
Manufacturing method of semiconductor device, and substrate processing apparatus
HITACHI INT ELECTRIC INC46 citations91
US7883581B2Feb 8, 2011
Substrate processing apparatus and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC11 citations84
US7871938B2Jan 18, 2011
Producing method of semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC10 citations84
USD739831SSep 29, 2015
Boat for substrate processing apparatus
HITACHI INT ELECTRIC INC15 citations83
US9793107B2Oct 17, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC4 citations73
US9698007B2Jul 4, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC3 citations73
US9177786B2Nov 3, 2015
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC5 citations73
US10229829B2Mar 12, 2019
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium
HITACHI INT ELECTRIC INC3 citations72
US10163625B2Dec 25, 2018
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium
HITACHI INT ELECTRIC INC2 citations72
US7795143B2Sep 14, 2010
Substrate processing apparatus and manufacturing method of semiconductor device
HITACHI INT ELECTRIC INC6 citations71
US7879400B2Feb 1, 2011
Substrate processing apparatus, method of manufacturing a semiconductor device, and method of forming a thin film on metal surface
HITACHI INT ELECTRIC INC2 citations63
US9349587B2May 24, 2016
Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatus
HITACHI INT ELECTRIC INC0 citations52
US7858534B2Dec 28, 2010
Semiconductor device manufacturing method and substrate processing apparatus
HITACHI INT ELECTRIC INC0 citations52
US9666430B2May 30, 2017
Method of manufacturing semiconductor device and substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations50
US8367530B2Feb 5, 2013
Substrate processing apparatus and manufacturing method of semiconductor device
HITACHI INT ELECTRIC INC0 citations49
KOKUSAI ELECTRIC CO LTD
6 patentsUS6486083B1Nov 26, 2002
Semiconductor device manufacturing method and semiconductor manufacturing apparatus
KOKUSAI ELECTRIC CO LTD74 citations96
US6524650B1Feb 25, 2003
Substrate processing apparatus and method
KOKUSAI ELECTRIC CO LTD32 citations91
US6139642AOct 31, 2000
Substrate processing apparatus and method
KOKUSAI ELECTRIC CO LTD37 citations91
US5902103AMay 11, 1999
Vertical furnace of a semiconductor manufacturing apparatus and a boat cover thereof
KOKUSAI ELECTRIC CO LTD26 citations89
US6716772B2Apr 6, 2004
Semiconductor device manufacturing method and semiconductor manufacturing apparatus
KOKUSAI ELECTRIC CO LTD7 citations74
US7432215B2Oct 7, 2008
Semiconductor device manufacturing method and semiconductor manufacturing apparatus
KOKUSAI ELECTRIC CO LTD0 citations52
OZAKI TAKASHI
4 patentsUS8057599B2Nov 15, 2011
Substrate processing apparatus and method for manufacturing a semiconductor device
OZAKI TAKASHI14 citations91
US8084369B2Dec 27, 2011
Producing method of semiconductor device and substrate processing apparatus
OZAKI TAKASHI8 citations84
US8293646B2Oct 23, 2012
Semiconductor device manufacturing method and substrate processing apparatus
OZAKI TAKASHI4 citations62
US8282737B2Oct 9, 2012
Substrate processing apparatus and method for manufacturing a semiconductor device
OZAKI TAKASHI4 citations61
KOKUSAI ELECTRIC CORP
3 patentsUS10840094B2Nov 17, 2020
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP4 citations71
US10497561B2Dec 3, 2019
Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations51
US12461507B2Nov 4, 2025
Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control program
KOKUSAI ELECTRIC CORP0 citations48