Inventor · disambiguated record
Satoko Gatineau
Also filed as: GATINEAU SATOKO
17 granted patents·5 pending applications·32 citations·filing 2009–2020
89Inventor score
Files withAIR LIQUIDE12L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude4GATINEAU SATOKO3L AIR LIQUIDE SOCIÉTÉ ANONYME POUR L ETUDE ET L EXPL DES PROCÉDÉS GEORGES CLAUDE1L'AIR LIQUIDE SOC ANONYME POUR L'ETUDE ET I'EXPLOITATION DES PROCEDES GEORGES CLAUDE1
Top patents by PatentIndex Score
22 records- 0190US8853075B2Method for forming a titanium-containing layer on a substrate using an atomic layer deposition (ALD) processGATINEAU SATOKO·Filed 2009·Granted Oct 7, 2014·14 cites·20 claims
- 0287US10364259B2Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the sameAIR LIQUIDE·Filed 2016·Granted Jul 30, 2019·2 cites·21 claims
- 0387US8092721B2Deposition of ternary oxide films containing ruthenium and alkali earth metalsGATINEAU SATOKO·Filed 2009·Granted Jan 10, 2012·8 cites·9 claims
- 0486US10287175B1Method for purification and storage of Til4 for Ti-containing film depositionAIR LIQUIDE·Filed 2015·Granted May 14, 2019·2 cites·13 claims
- 0576US9738971B2Vapor deposition methods to form group 8-containing filmsL'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude·Filed 2015·Granted Aug 22, 2017·1 cites·11 claims
- 0673US8357614B2Ruthenium-containing precursors for CVD and ALDAIR LIQUIDE·Filed 2010·Granted Jan 22, 2013·3 cites·17 claims
- 0771US2020032397A1Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the sameAIR LIQUIDE·Filed 2019·Application pending·0 cites
- 0869US9187511B2Titanium-aluminum alloy deposition with titanium-tetrahydroaluminate bimetallic moleculesL AIR LIQUIDE SOCIÉTÉ ANONYME POUR L ETUDE ET L EXPL DES PROCÉDÉS GEORGES CLAUDE·Filed 2013·Granted Nov 17, 2015·1 cites·16 claims
- 0967US11242597B2Lanthanide precursors and deposition of lanthanide-containing films using the sameAIR LIQUIDE·Filed 2020·Granted Feb 8, 2022·0 cites·10 claims
- 1067US10895012B2Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the sameLAIR LIQUIDE SA POUR LETUDE ET LEXPLOITATION DES PROCEDES GEROGES CLAUDE·Filed 2019·Granted Jan 19, 2021·0 cites·17 claims
- 1167US10337104B2Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the sameAIR LIQUIDE·Filed 2016·Granted Jul 2, 2019·0 cites·20 claims
- 1265US10465289B2Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the sameAIR LIQUIDE·Filed 2016·Granted Nov 5, 2019·0 cites·9 claims
- 1361US2017107612A1Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the sameL'AIR LIQUIDE SOC ANONYME POUR L'ETUDE ET I'EXPLOITATION DES PROCEDES GEORGES CLAUDE·Filed 2016·Application pending·0 cites
- 1460US9487860B2Method for forming cobalt containing filmsL'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude·Filed 2014·Granted Nov 8, 2016·1 cites·5 claims
- 1560US2020149165A1Zirconium, hafnium, titanium precursors and deposition of group 4 containing films using the sameAIR LIQUIDE·Filed 2020·Application pending·0 cites
- 1659US2012070582A1Deposition of ternary oxide films containing ruthenium and alkali earth metalsGATINEAU SATOKO·Filed 2011·Application pending·0 cites
- 1754US2018187303A1Lanthanide precursors and deposition of lanthanide-containing films using the sameAIR LIQUIDE·Filed 2016·Application pending·0 cites
- 1849US10648087B2Etching reactants and plasma-free etching processes using the sameAIR LIQUIDE·Filed 2016·Granted May 12, 2020·0 cites·16 claims
- 1949US10011903B2Manganese-containing film forming compositions, their synthesis, and use in film depositionAIR LIQUIDE·Filed 2015·Granted Jul 3, 2018·0 cites·14 claims
- 2047US9790247B2Cobalt-containing compounds, their synthesis, and use in cobalt-containing film depositionL'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude·Filed 2014·Granted Oct 17, 2017·0 cites·20 claims
- 2146US10309010B2Cobalt-containing compounds, their synthesis, and use in cobalt-containing film depositionAIR LIQUIDE·Filed 2014·Granted Jun 4, 2019·0 cites·18 claims
- 2245US9719167B2Cobalt-containing film forming compositions, their synthesis, and use in film depositionL'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude·Filed 2015·Granted Aug 1, 2017·0 cites·20 claims
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