Inventor
BOBEK SARAH MICHELLE
US19 patents
Patents
19 patentsUS11742185B2Aug 29, 2023
Uniform in situ cleaning and deposition
APPLIED MATERIALS INC2 citations72
US11694902B2Jul 4, 2023
Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers
APPLIED MATERIALS INC2 citations72
US11674222B2Jun 13, 2023
Method of in situ ceramic coating deposition
APPLIED MATERIALS INC2 citations72
US11600470B2Mar 7, 2023
Targeted heat control systems
APPLIED MATERIALS INC2 citations71
US12347653B2Jul 1, 2025
Uniform in situ cleaning and deposition
APPLIED MATERIALS INC0 citations62
US12234549B2Feb 25, 2025
Method of in situ ceramic coating deposition
APPLIED MATERIALS INC0 citations62
US12000048B2Jun 4, 2024
Pedestal for substrate processing chambers
APPLIED MATERIALS INC0 citations62
US11584994B2Feb 21, 2023
Pedestal for substrate processing chambers
APPLIED MATERIALS INC1 citations62
US12334384B2Jun 17, 2025
Methods and apparatus for minimizing substrate backside damage
APPLIED MATERIALS INC0 citations61
US12211728B2Jan 28, 2025
Electrostatic chuck design with improved chucking and arcing performance
APPLIED MATERIALS INC0 citations61
US12211673B2Jan 28, 2025
Processing chamber deposition confinement
APPLIED MATERIALS INC0 citations61
US12131913B2Oct 29, 2024
Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers
APPLIED MATERIALS INC0 citations61
US11756819B2Sep 12, 2023
Methods and apparatus for minimizing substrate backside damage
APPLIED MATERIALS INC0 citations61
US11682574B2Jun 20, 2023
Electrostatic chuck design with improved chucking and arcing performance
APPLIED MATERIALS INC0 citations61
US11699577B2Jul 11, 2023
Treatment for high-temperature cleans
APPLIED MATERIALS INC0 citations60
US10923334B2Feb 16, 2021
Selective deposition of hardmask
APPLIED MATERIALS INC0 citations60
US12444615B2Oct 14, 2025
Forming a doped hardmask
APPLIED MATERIALS INC0 citations57
US12100609B2Sep 24, 2024
Electrostatic chucking process
APPLIED MATERIALS INC0 citations51
US11830706B2Nov 28, 2023
Heated pedestal design for improved heat transfer and temperature uniformity
APPLIED MATERIALS INC0 citations50