Inventor
REDDY SUNDARAPANDIAN RAMALINGA VIJAYALAKSHMI
IN5 patents
Patents
5 patentsUS11600477B2Mar 7, 2023
Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process
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US12338527B2Jun 24, 2025
Shutter disk for physical vapor deposition (PVD) chamber
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USD1072774SApr 29, 2025
Target profile for a physical vapor deposition chamber target
APPLIED MATERIALS INC1 citations60
US11898236B2Feb 13, 2024
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC1 citations60
US12183560B2Dec 31, 2024
Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process
APPLIED MATERIALS INC0 citations58