USD1072774SActiveUtility

Target profile for a physical vapor deposition chamber target

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Assignee: APPLIED MATERIALS INCPriority: Feb 6, 2021Filed: Feb 6, 2021Granted: Apr 29, 2025
Est. expiryFeb 6, 2041(~14.5 yrs left)· nominal 20-yr term from priority
Inventors:Shane LavanMadan Kumar Shimoga MylarappaSundarapandian Ramalinga Vijayalakshmi ReddyAvinash NayakWei DouYong CaoKirankumar Neelasandra SavandaiahMingdong Li
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PatentIndex Score
1
Cited by
147
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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