Inventor · disambiguated record
Theodorus Gerardus Maria Oosterlaken
Also filed as: OOSTERLAKEN THEODORUS G M · OOSTERLAKEN THEODORUS GERARDUS · OOSTERLAKEN THEODORUS GERARDUS MARIA
16 granted patents·2 pending applications·3,325 citations·filing 1998–2011
96Inventor score
Files withASM INT14DE RIDDER CHRIS G M1DE RIDDER CHRISTIANUS GERARDUS MARIA1OOSTERLAKEN THEODORUS GERARDUS MARIA1
Top patents by PatentIndex Score
18 records- 0198US7674726B2Parts for deposition reactorsASM INT·Filed 2005·Granted Mar 9, 2010·376 cites·9 claims
- 0298US7256375B2Susceptor plate for high temperature heat treatmentASM INT·Filed 2003·Granted Aug 14, 2007·388 cites·30 claims
- 0398US6746240B2Process tube support sleeve with circumferential channelsASM INT·Filed 2003·Granted Jun 8, 2004·397 cites·58 claims
- 0496US6902395B2Multilevel pedestal for furnaceASM INT·Filed 2003·Granted Jun 7, 2005·368 cites·44 claims
- 0596US6481945B1Method and device for transferring wafersASM INT·Filed 1999·Granted Nov 19, 2002·540 cites·6 claims
- 0696US6328561B1Method for cooling a furnace, and furnace provided with a cooling deviceASM INT·Filed 1998·Granted Dec 11, 2001·354 cites·11 claims
- 0794US9018567B2Wafer processing apparatus with heated, rotating substrate supportDE RIDDER CHRIS G M·Filed 2011·Granted Apr 28, 2015·470 cites·18 claims
- 0894US6316371B1Method for the chemical treatment of a semiconductor substrateASM INT·Filed 1999·Granted Nov 13, 2001·346 cites·10 claims
- 0988US7048488B1Apparatus for transferring wafer and ringASM INT·Filed 2000·Granted May 23, 2006·51 cites·9 claims
- 1085US8012876B2Delivery of vapor precursor from solid sourceASM INT·Filed 2008·Granted Sep 6, 2011·6 cites·17 claims
- 1177US7128570B2Method and apparatus for purging seals in a thermal reactorASM INT·Filed 2005·Granted Oct 31, 2006·6 cites·29 claims
- 1274US7273819B2Method and apparatus for processing semiconductor substratesASM INT·Filed 2005·Granted Sep 25, 2007·4 cites·36 claims
- 1370US7718518B2Low temperature doped silicon layer formationASM INT·Filed 2006·Granted May 18, 2010·4 cites·31 claims
- 1468US7749918B2Method and apparatus for processing semiconductor substratesASM INT·Filed 2007·Granted Jul 6, 2010·2 cites·25 claims
- 1567US6413844B1Safe arsenic gas phase dopingASM INT·Filed 2001·Granted Jul 2, 2002·12 cites·37 claims
- 1655US8099190B2Apparatus and method for transferring two or more wafers whereby the positions of the wafers can be measuredDE RIDDER CHRISTIANUS GERARDUS MARIA·Filed 2007·Granted Jan 17, 2012·1 cites·19 claims
- 1744US2008227267A1Stop mechanism for trench reshaping processOOSTERLAKEN THEODORUS GERARDUS MARIA·Filed 2007·Application pending·0 cites
- 1838US2003111013A1Method for the deposition of silicon germanium layersFiled 2002·Application pending·0 cites
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