Inventor · disambiguated record
Kazuya Uoyama
Also filed as: UOYAMA KAZUYA
2 granted patents·4 pending applications·0 citations·filing 2013–2023
22Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0151US2023395411A1Data collection system, data collection apparatus, data collection method, and data collection programTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0248US2024045388A1Management apparatus, prediction method, and prediction programTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0343US2024045401A1Management system, management method, and management programTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0441US9810905B2Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording mediumTOKYO ELECTRON LTD·Filed 2014·Granted Nov 7, 2017·0 cites·17 claims
- 0539US2015201167A1Fabrication equipment monitoring device and monitoring methodTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0633US9704367B2Clean-room monitoring device and method for monitoring clean-roomTOKYO ELECTRON LTD·Filed 2015·Granted Jul 11, 2017·0 cites·7 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →