Inventor
LU MAN-LING
TW15 patents
Patents
15 patentsUS9786510B2Oct 10, 2017
Fin-shaped structure and manufacturing method thereof
UNITED MICROELECTRONICS CORP5 citations84
US9780218B1Oct 3, 2017
Bottom-up epitaxy growth on air-gap buffer
UNITED MICROELECTRONICS CORP8 citations83
US9385191B2Jul 5, 2016
FINFET structure
UNITED MICROELECTRONICS CORP10 citations83
US10050146B2Aug 14, 2018
Semiconductor device and method of forming the same
UNITED MICROELECTRONICS CORP2 citations73
US9224864B1Dec 29, 2015
Semiconductor device and method of fabricating the same
UNITED MICROELECTRONICS CORP4 citations73
US10158022B2Dec 18, 2018
Bottom-up epitaxy growth on air-gap buffer
UNITED MICROELECTRONICS CORP2 citations72
US9899523B2Feb 20, 2018
Semiconductor structure
UNITED MICROELECTRONICS CORP5 citations72
US9691901B2Jun 27, 2017
Semiconductor device
UNITED MICROELECTRONICS CORP6 citations72
US10930517B2Feb 23, 2021
Method of forming fin-shaped structure
UNITED MICROELECTRONICS CORP0 citations62
US10529856B2Jan 7, 2020
Method of forming semiconductor device
UNITED MICROELECTRONICS CORP0 citations52
US10418251B2Sep 17, 2019
Method of forming fin-shaped structure having ladder-shaped cross-sectional profile
UNITED MICROELECTRONICS CORP0 citations52
US9634125B2Apr 25, 2017
Fin field effect transistor device and fabrication method thereof
UNITED MICROELECTRONICS CORP1 citations52
US9397190B2Jul 19, 2016
Fabrication method of semiconductor structure
UNITED MICROELECTRONICS CORP0 citations52
US9373718B2Jun 21, 2016
Etching method for forming grooves in Si-substrate and fin field-effect transistor
UNITED MICROELECTRONICS CORP1 citations51
US9978854B2May 22, 2018
Fin field-effect transistor
UNITED MICROELECTRONICS CORP0 citations41