Inventor

KITAJIMA TOMOHIKO

US35 patents

⚠️ This page may combine multiple inventors who share the name “KITAJIMA TOMOHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KITAJIMA TOMOHIKO

APPLIED MATERIALS INC

Methods and apparatus for three dimensional NAND structure fabrication

3D NAND etch

Methods and apparatus for three-dimensional NAND structure fabrication

Polishing with eddy current feed meaurement prior to deposition of conductive layer

Confined charge trap layer

3D dram structure with high mobility channel

Three-dimensional dynamic random access memory (DRAM) and methods of forming the same

Polishing with pre deposition spectrum

Double sided buff module for post CMP cleaning

Methods and structures for three-dimensional dynamic random-access memory

Direct word line contact and methods of manufacture for 3D memory

Confined charge trap layer

L-type wordline connection structure for three-dimensional memory

Structure and fabrication method of high voltage MOSFET with a vertical drift region

Selection gate separation for 3D NAND

3D DRAM structure with high mobility channel

3-d dram cell with mechanical stability

3D-NAND memory cell structure

Memory cell fabrication for 3D NAND applications

Methods and apparatus for three dimensional NAND structure fabrication

Methods and apparatus for three dimensional NAND structure fabrication

3D-NAND mold

Memory cell fabrication for 3D nand applications

Sequential plasma and thermal treatment

3D NAND etch

Polishing method and apparatus

Forming a doped hardmask

Integrated method and tool for high quality selective silicon nitride deposition

Three dimensional memory device and method of fabrication

NAND cell structure with charge trap cut

Selection gate separation for 3D NAND

3-D DRAM structures and methods of manufacture

Polishing with measurement prior to deposition of outer layer

Reduced strain Si/SiGe heteroepitaxy stacks for 3D DRAM

XU KUN

Temperature control of chemical mechanical polishing