Inventor · disambiguated record
Mike Whelan
Also filed as: WHELAN MIKE
13 granted patents·3 pending applications·190 citations·filing 1993–2023
92Inventor score
Top patents by PatentIndex Score
16 records- 0191US8125633B2Calibration of a radiometric optical monitoring system used for fault detection and process monitoringWHELAN MIKE·Filed 2008·Granted Feb 28, 2012·38 cites·48 claims
- 0288US9997325B2Electron beam exciter for use in chemical analysis in processing systemsHOSCH JIMMY W·Filed 2009·Granted Jun 12, 2018·24 cites·9 claims
- 0383US10365212B2System and method for calibration of optical signals in semiconductor process systemsVERITY INSTR INC·Filed 2017·Granted Jul 30, 2019·5 cites·27 claims
- 0478US11424115B2Multimode configurable spectrometerVERITY INSTR INC·Filed 2018·Granted Aug 23, 2022·2 cites·42 claims
- 0577US9310250B1High dynamic range measurement system for process monitoringVERITY INSTR INC·Filed 2015·Granted Apr 12, 2016·2 cites·23 claims
- 0676US6642063B2Apparatus for characterization of microelectronic feature qualityLAM RES CORP·Filed 2002·Granted Nov 4, 2003·16 cites·29 claims
- 0773US5364005AUltrasonic transducer and mountVERITY INSTR INC·Filed 1993·Granted Nov 15, 1994·30 cites·9 claims
- 0868US12449622B2Fiberoptical cable assemblies and interfaces for spectrometersVERITY INSTR INC·Filed 2023·Granted Oct 21, 2025·0 cites·30 claims
- 0967US9383323B2Workpiece characterization systemMELONI MARK ANTHONY·Filed 2011·Granted Jul 5, 2016·2 cites·20 claims
- 1066US6432729B1Method for characterization of microelectronic feature qualityLAM RES CORP·Filed 1999·Granted Aug 13, 2002·28 cites·7 claims
- 1161US5816476ADual frequency power supply and transducerVERITY INSTR INC·Filed 1996·Granted Oct 6, 1998·32 cites·5 claims
- 1259US2022406586A1Multimode configurable spectrometerVERITY INSTR INC·Filed 2022·Application pending·0 cites
- 1357US2024019305A1System and method for fault detection and operational readiness for optical instruments for semiconductor processesVERITY INSTR INC·Filed 2023·Application pending·0 cites
- 1454US9801265B2High dynamic range measurement system for process monitoringVERITY INSTR INC·Filed 2016·Granted Oct 24, 2017·0 cites·17 claims
- 1545US5595330APower supplyVERITY INSTR INC·Filed 1994·Granted Jan 21, 1997·11 cites·4 claims
- 1637US2012120387A1Workpiece Characterization SystemMELONI MARK ANTHONY·Filed 2011·Application pending·0 cites
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