Inventor · disambiguated record
Axel Zibold
Also filed as: ZIBOLD AXEL
5 granted patents·2 pending applications·41 citations·filing 2003–2009
76Inventor score
Top patents by PatentIndex Score
7 records- 0181US7623620B2Reflective X-ray microscope and inspection system for examining objects with wavelengths <100 nmZEISS CARL SMT AG·Filed 2004·Granted Nov 24, 2009·26 cites·25 claims
- 0278US8730474B2Method and apparatus for measuring of masks for the photo-lithographySCHERUEBL THOMAS·Filed 2009·Granted May 20, 2014·7 cites·25 claims
- 0377US7916930B2Method and arrangement for repairing photolithography masksZEISS CARL SMS GMBH·Filed 2007·Granted Mar 29, 2011·5 cites·13 claims
- 0460US8705838B2Method for mask inspection for mask design and mask productionBOEHM KLAUS·Filed 2006·Granted Apr 22, 2014·3 cites·18 claims
- 0535US8268516B2Method for repairing phase shift masksZIBOLD AXEL·Filed 2008·Granted Sep 18, 2012·0 cites·20 claims
- 0633US2006154150A1Arrangement for the production of photomasksENGEL THOMAS·Filed 2003·Application pending·0 cites
- 0732US2006291031A1Arrangement of aperture diaphragms and/or filters, with changeable characteristics for optical devicesBOEHM KLAUS·Filed 2006·Application pending·0 cites
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