Inventor
YOSHIDA NAOMI
US52 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIDA NAOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
39 patentsUS6488984B1Dec 3, 2002
Film deposition method and apparatus
APPLIED MATERIALS INC231 citations98
US9484406B1Nov 1, 2016
Method for fabricating nanowires for horizontal gate all around devices for semiconductor applications
APPLIED MATERIALS INC79 citations97
US10177227B1Jan 8, 2019
Method for fabricating junctions and spacers for horizontal gate all around devices
APPLIED MATERIALS INC40 citations92
US5953630ASep 14, 1999
Suppression of tungsten film deposition on a semiconductor wafer bevel edge with a halogenide purge gas
APPLIED MATERIALS INC32 citations90
US9865735B2Jan 9, 2018
Horizontal gate all around and FinFET device isolation
APPLIED MATERIALS INC4 citations83
US9673277B2Jun 6, 2017
Methods and apparatus for forming horizontal gate all around device structures
APPLIED MATERIALS INC13 citations83
US9460920B1Oct 4, 2016
Horizontal gate all around device isolation
APPLIED MATERIALS INC15 citations83
US10777650B2Sep 15, 2020
Horizontal gate all around device nanowire air gap spacer formation
APPLIED MATERIALS INC5 citations82
US10608097B2Mar 31, 2020
Low thickness dependent work-function nMOS integration for metal gate
APPLIED MATERIALS INC2 citations73
US10109534B2Oct 23, 2018
Multi-threshold voltage (Vt) workfunction metal by selective atomic layer deposition (ALD)
APPLIED MATERIALS INC5 citations73
US9748354B2Aug 29, 2017
Multi-threshold voltage structures with a lanthanum nitride film and methods of formation thereof
APPLIED MATERIALS INC5 citations73
US6852626B1Feb 8, 2005
Film deposition method and apparatus
APPLIED MATERIALS INC9 citations73
US11245022B2Feb 8, 2022
Integrated dipole flow for transistor
APPLIED MATERIALS INC2 citations72
US11145761B2Oct 12, 2021
Horizontal gate all around and FinFET device isolation
APPLIED MATERIALS INC2 citations72
US10573719B2Feb 25, 2020
Horizontal gate all around device isolation
APPLIED MATERIALS INC2 citations72
US10490666B2Nov 26, 2019
Horizontal gate all around and FinFET device isolation
APPLIED MATERIALS INC1 citations72
US10727080B2Jul 28, 2020
Tantalum-containing material removal
APPLIED MATERIALS INC4 citations71
US7365529B2Apr 29, 2008
Test structure design for reliability test
APPLIED MATERIALS INC2 citations63
US12543547B2Feb 3, 2026
Method of dielectric material fill and treatment
APPLIED MATERIALS INC0 citations62
US12046508B2Jul 23, 2024
Method of dielectric material fill and treatment
APPLIED MATERIALS INC0 citations62
US11894233B2Feb 6, 2024
Electronic device having an oxygen free platinum group metal film
APPLIED MATERIALS INC0 citations62
US11615984B2Mar 28, 2023
Method of dielectric material fill and treatment
APPLIED MATERIALS INC0 citations62
US11488830B2Nov 1, 2022
Oxygen free deposition of platinum group metal films
APPLIED MATERIALS INC0 citations62
US6576567B1Jun 10, 2003
Film deposition method and apparatus for semiconductor devices
APPLIED MATERIALS INC3 citations62
US6511538B1Jan 28, 2003
Film deposition method and apparatus for semiconductor devices
APPLIED MATERIALS INC3 citations62
US11888045B2Jan 30, 2024
Integrated dipole flow for transistor
APPLIED MATERIALS INC0 citations61
US11848369B2Dec 19, 2023
Horizontal gate-all-around device nanowire air gap spacer formation
APPLIED MATERIALS INC0 citations61
US11830725B2Nov 28, 2023
Method of cleaning a structure and method of depositing a capping layer in a structure
APPLIED MATERIALS INC0 citations61
US11282936B2Mar 22, 2022
Horizontal gate all around device nanowire air gap spacer formation
APPLIED MATERIALS INC0 citations61
US11075276B2Jul 27, 2021
Methods and apparatus for n-type metal oxide semiconductor (NMOS) metal gate materials using atomic layer deposition (ALD) processes with metal based precursors
APPLIED MATERIALS INC1 citations60
US10170321B2Jan 1, 2019
Aluminum content control of TiAIN films
APPLIED MATERIALS INC1 citations60
US12592369B2Mar 31, 2026
Integrated method and tool for high quality selective silicon nitride deposition
APPLIED MATERIALS INC0 citations52
US10665450B2May 26, 2020
Methods and apparatus for doping engineering and threshold voltage tuning by integrated deposition of titanium nitride and aluminum films
APPLIED MATERIALS INC0 citations52
US7119571B2Oct 10, 2006
Test structure design for reliability test
APPLIED MATERIALS INC0 citations52
US10553425B2Feb 4, 2020
Self-limiting and saturating chemical vapor deposition of a silicon bilayer and ALD
APPLIED MATERIALS INC0 citations51
US9773663B2Sep 26, 2017
Self-limiting and saturating chemical vapor deposition of a silicon bilayer and ALD
APPLIED MATERIALS INC0 citations51
US8349741B2Jan 8, 2013
Amorphous carbon deposition method for improved stack defectivity
APPLIED MATERIALS INC0 citations51
US6593252B1Jul 15, 2003
Film deposition method and apparatus
APPLIED MATERIALS INC0 citations51
US12062545B2Aug 13, 2024
Fluorine-free tungsten ALD for dielectric selectivity improvement
APPLIED MATERIALS INC0 citations49
BABCOCK HITACHI KK
4 patentsUS5155083AOct 13, 1992
Catalyst for reducing nitrogen oxides and process for making the catalyst
BABCOCK HITACHI KK23 citations92
US5294584AMar 15, 1994
Process for producing a denitration catalyst
BABCOCK HITACHI KK15 citations73
US5059576AOct 22, 1991
Catalyst for removing nitrogen oxides and a process for producing the same
BABCOCK HITACHI KK16 citations73
US6833117B1Dec 21, 2004
Exhaust emission control catalyst element, catalyst structure, production method thereof, exhaust emission control apparatus and exhaust emission control method using the apparatus
BABCOCK HITACHI KK5 citations61
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
2 patentsYOSHIDA NAOMI
1 patentYU HANG
1 patentFREUNT IND CO LTD
1 patentUNIV CALIFORNIA
1 patentAKIZUKI NAOMICHI
1 patentShowing the top 50 of 52 patents by PatentIndex Score.