Inventor · disambiguated record
Kazuya Togashi
Also filed as: TOGASHI KAZUYA
4 granted patents·15 citations·filing 1988–2005
64Inventor score
Top patents by PatentIndex Score
4 records- 0148US4857270AProcess for manufacturing silicon-germanium alloysKOMATSU DENSHI KINZOKU KK·Filed 1988·Granted Aug 15, 1989·14 cites·3 claims
- 0245US7147710B2Method of manufacturing epitaxial silicon waferKOMATSU DENSHI KINZOKU KK·Filed 2002·Granted Dec 12, 2006·1 cites·22 claims
- 0327US7522290B2Apparatus and method for inspecting semiconductor waferSUMCO TECHXIV CORP·Filed 2005·Granted Apr 21, 2009·0 cites·3 claims
- 0422US7576852B2Semiconductor wafer inspection device and methodSUMCO TECH XIV CORP·Filed 2005·Granted Aug 18, 2009·0 cites·6 claims
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