Inventor
HWANG JAE SEOK
KR7 patents
⚠️ This page may combine multiple inventors who share the name “HWANG JAE SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADP ENGINEERING CO LTD
5 patentsUS7765682B2Aug 3, 2010
Apparatus for attaching substrates
ADP ENGINEERING CO LTD10 citations82
US7980287B2Jul 19, 2011
Adhesive chuck and substrate bonding apparatus
ADP ENGINEERING CO LTD8 citations80
US7864289B2Jan 4, 2011
Apparatus and method for attaching substrates
ADP ENGINEERING CO LTD3 citations60
US7640960B2Jan 5, 2010
Apparatus for attaching substrates
ADP ENGINEERING CO LTD0 citations50
US8363377B2Jan 29, 2013
Electrostatic chuck and apparatus having the same
ADP ENGINEERING CO LTD0 citations48