Apparatus for attaching substrates

Abstract

An apparatus for attaching two substrates to one another includes a lower chamber that holds a first substrate and an upper chamber that holds a second substrate. The upper and lower chambers are brought together to provide a space in which an attaching process is performed. Chamber transportation mechanisms are located at corners of the lower chamber and serve to move the lower chamber up toward the upper chamber so that it can be coupled with the upper chamber. Guide parts are also formed on side surfaces of the lower chamber to guide movement, and to reduce deformation of the chamber when pressure differentials act to deform the sides of the chamber.

1. An apparatus for attaching substrates, comprising:
 a lower chamber in which a first substrate is held; 
 an upper chamber in which a second substrate is held, wherein the upper and lower chambers can be brought together to form a sealed space in which the first and second substrates are attached to one another; 
 a chamber transportation mechanism that moves at least one of the lower and upper chambers so that the chambers can be brought together and moved apart, wherein the chamber transportation mechanism includes moving elements extending outward from outer surfaces of sidewalls of at least one of the lower and upper chambers at corners thereof. 
 
   
   
     2. The apparatus of  claim 1 , wherein the transportation mechanism moves the lower chamber up and down relative to the upper chamber. 
   
   
     3. The apparatus of  claim 1 , wherein the moving elements comprise four linear movement devices, and wherein one linear movement device extends outward from each of four corners of the at least one of the lower and upper chambers. 
   
   
     4. The apparatus of  claim 1 , wherein the chamber transportation mechanism comprises a motor that provides a driving force, and wherein the driving force of the motor is supplied to the moving elements. 
   
   
     5. The apparatus of  claim 4 , wherein the moving elements comprise ball and screw mechanisms that are coupled to at least one of the upper and lower chambers. 
   
   
     6. The apparatus of  claim 5 , wherein a shaft of each of the ball and screw mechanisms is rotated by the motor to cause at least one of the upper and lower chambers to move upward and downward. 
   
   
     7. The apparatus of  claim 6 , wherein the shafts of the ball and screw mechanisms are coupled to threaded portions of the lower chamber, and wherein rotation of the shafts causes the lower chamber to move upward and downward relative to the upper chamber. 
   
   
     8. The apparatus of  claim 1 , further comprising a plurality of linear movement guides that guide movement of at least one of the upper and lower chambers. 
   
   
     9. The apparatus of  claim 8 , wherein the linear movement guides are positioned on sides of the apparatus. 
   
   
     10. The apparatus of  claim 9 , wherein one linear movement guide is located at approximately a center of each side of the apparatus. 
   
   
     11. The apparatus of  claim 9 , wherein two linear movement guides are located on each side of the apparatus. 
   
   
     12. The apparatus of  claim 11 , wherein the linear movement guides on each side of the apparatus are located between a center and ends of the sides of the apparatus. 
   
   
     13. The apparatus of  claim 9 , wherein the linear movement guides are configured to prevent the sides of the upper and lower chambers from flexing inward when a pressure differential exists between the sealed space and an exterior of the apparatus. 
   
   
     14. The apparatus of  claim 9 , wherein the transportation mechanism moves the lower chamber up and down relative to the upper chamber. 
   
   
     15. The apparatus of  claim 9 , wherein the moving elements comprise four linear movement devices, and wherein one linear movement device extends outward from each of four corners of the at least one of the lower and upper chambers. 
   
   
     16. The apparatus of  claim 9 , wherein the chamber transportation mechanism comprises a motor that provides a driving force, and wherein the driving force of the motor is supplied to the moving elements. 
   
   
     17. The apparatus of  claim 16 , wherein the moving elements comprise bail and screw mechanisms that are coupled to at least one of the upper and lower chambers. 
   
   
     18. The apparatus of  claim 17 , wherein a shaft of each of the ball and screw mechanisms is rotated by the motor to cause at least one of the upper and lower chambers to move upward and downward. 
   
   
     19. The apparatus of  claim 18 , wherein the shafts of the ball and screw mechanisms are coupled to threaded portions of the lower chamber, and wherein rotation of the shafts causes the lower chamber to move upward and downward relative to the upper chamber. 
   
   
     20. The apparatus of  claim 1 , further comprising:
 an alignment device that adjusts a position of at least one of the first and second substrates relative to the other to properly align the first and second substrates; and 
 a sealing member that is positioned between the upper and lower chambers when they are brought together to form the sealed space.