Inventor · disambiguated record
Abhijit A. Kangude
Also filed as: KANGUDE ABHIJIT · KANGUDE ABHIJIT A · KANGUDE ABHIJIT ASHOK
15 granted patents·11 pending applications·16 citations·filing 2011–2025
87Inventor score
Top patents by PatentIndex Score
26 records- 0188US9506145B2Method and hardware for cleaning UV chambersAPPLIED MATERIALS INC·Filed 2016·Granted Nov 29, 2016·3 cites·20 claims
- 0288US9364871B2Method and hardware for cleaning UV chambersAPPLIED MATERIALS INC·Filed 2013·Granted Jun 14, 2016·4 cites·11 claims
- 0384US11881416B2Gas delivery system for a shared gas delivery architectureAPPLIED MATERIALS INC·Filed 2020·Granted Jan 23, 2024·2 cites·19 claims
- 0482US8309421B2Dual-bulb lamphead control methodologyYANG YAO-HUNG·Filed 2011·Granted Nov 13, 2012·5 cites·17 claims
- 0579US11594409B2Systems and methods for depositing low-k dielectric filmsAPPLIED MATERIALS INC·Filed 2020·Granted Feb 28, 2023·1 cites·12 claims
- 0677US11694908B2Gasbox for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Jul 4, 2023·1 cites·20 claims
- 0774US12057325B2Gasbox for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2023·Granted Aug 6, 2024·0 cites·19 claims
- 0871US2025014914A1Gasbox for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0967US12198925B2Systems and methods for depositing low-k dielectric filmsAPPLIED MATERIALS INC·Filed 2022·Granted Jan 14, 2025·0 cites·20 claims
- 1065US11487304B2Process fluid path switching in recipe operationsAPPLIED MATERIALS INC·Filed 2021·Granted Nov 1, 2022·0 cites·20 claims
- 1164US11714430B2Process fluid path switching in recipe operationsAPPLIED MATERIALS INC·Filed 2022·Granted Aug 1, 2023·0 cites·19 claims
- 1263US2025376761A1Method for forming high density carbon films with reduced substrate backside damageAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1363US2025257451A1High density amorphous carbon film with reduced hydrogen contentAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1459US2025293009A1Advanced thermal management system (atm) for pedestal temperature control in high power pecvd chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1557US2024047185A1Shared rps clean and bypass delivery architectureAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1657US2024043999A1Single process gas feed line architectureAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1756US12444621B2High conductance divert line architectureAPPLIED MATERIALS INC·Filed 2022·Granted Oct 14, 2025·0 cites·20 claims
- 1855US11326256B2Dome stress isolating layerAPPLIED MATERIALS INC·Filed 2019·Granted May 10, 2022·0 cites·20 claims
- 1955US2021375586A1An advanced ceramic lid with embedded heater elements and embedded rf coil for hdp cvd and inductively coupled plasma treatment chambersAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2054US11227746B2Isolated backside helium delivery systemAPPLIED MATERIALS INC·Filed 2019·Granted Jan 18, 2022·0 cites·20 claims
- 2153US10300557B2Hybrid substrate processingAPPLE INC·Filed 2017·Granted May 28, 2019·0 cites·21 claims
- 2251US12205845B2Semiconductor processing chamber to accommodate parasitic plasma formationAPPLIED MATERIALS INC·Filed 2020·Granted Jan 21, 2025·0 cites·14 claims
- 2348US2013122611A1Dual-bulb lamphead control methodologyYANG YAO-HUNG·Filed 2012·Application pending·0 cites
- 2443US2020219698A1Recursive coils for inductively coupled plasmasAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2542US2014264059A1Light irradiance and thermal measurement in uv and cvd chambersAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 2641US2015211114A1Bottom pump and purge and bottom ozone clean hardware to reduce fall-on particle defectsAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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