Inventor

OTAKI KATSURA

JP4 patents

⚠️ This page may combine multiple inventors who share the name “OTAKI KATSURA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

3 patents

US10288489B2May 14, 2019

Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one direction

NIKON CORP4 citations69

US12104891B1Oct 1, 2024

Spatially filtered talbot interferometer for wafer distortion measurement

NIKON CORP1 citations54

US10571340B2Feb 25, 2020

Method and device for measuring wavefront using diffraction grating, and exposure method and device

NIKON CORP0 citations48

OWA SOICHI

1 patent

US8807978B2Aug 19, 2014

Template manufacturing method, template inspecting method and inspecting apparatus, nanoimprint apparatus, nanoimprint system, and device manufacturing method

OWA SOICHI3 citations59