Inventor
SATO NOBUYOSHI
JP30 patents
⚠️ This page may combine multiple inventors who share the name “SATO NOBUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
6 patentsUS6156676ADec 5, 2000
Laser marking of semiconductor wafer substrate while inhibiting adherence to substrate surface of particles generated during laser marking
LSI LOGIC CORP17 citations84
US6276379B1Aug 21, 2001
Anti-microbubble deposition apparatus
LSI LOGIC CORP7 citations72
US6032529AMar 7, 2000
Liquid level sensor for buffered hydrofluoric acid
LSI LOGIC CORP11 citations70
US6248180B1Jun 19, 2001
Method for removing particles from a semiconductor wafer
LSI LOGIC CORP8 citations69
US6299723B1Oct 9, 2001
Anti-airlock apparatus for filters
LSI LOGIC CORP6 citations61
US7371659B1May 13, 2008
Substrate laser marking
LSI LOGIC CORP2 citations60
KAWASAKI STEEL CO
5 patentsUS5605867AFeb 25, 1997
Method of manufacturing insulating film of semiconductor device and apparatus for carrying out the same
KAWASAKI STEEL CO86 citations96
US5532191AJul 2, 1996
Method of chemical mechanical polishing planarization of an insulating film using an etching stop
KAWASAKI STEEL CO60 citations96
US5290736AMar 1, 1994
Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric
KAWASAKI STEEL CO62 citations94
US5336640AAug 9, 1994
Method of manufacturing a semiconductor device having an insulating layer composed of a BPSG film and a plasma-CVD silicon nitride film
KAWASAKI STEEL CO33 citations92
US5296037AMar 22, 1994
Plasma CVD system comprising plural upper electrodes
KAWASAKI STEEL CO9 citations69
ASAHI KASEI ENGINEERING CORP
4 patentsUS7139681B2Nov 21, 2006
System for diagnosing facility apparatus, managing apparatus and diagnostic apparatus
ASAHI KASEI ENGINEERING CORP9 citations71
US7085684B2Aug 1, 2006
System for diagnosing a facility apparatus
ASAHI KASEI ENGINEERING CORP8 citations71
US7513161B2Apr 7, 2009
Device for measuring thickness of vessel steel plate
ASAHI KASEI ENGINEERING CORP5 citations58
US7854168B2Dec 21, 2010
Thickness measuring device for vessel steel plate
ASAHI KASEI ENGINEERING CORP0 citations48
YOSHIDA HIDEO
3 patentsUS7323096B2Jan 29, 2008
Method for treating the surface of object and apparatus thereof
YOSHIDA HIDEO7 citations73
US7736442B2Jun 15, 2010
Method for activating surface of base material and apparatus thereof
YOSHIDA HIDEO0 citations50
US7300527B2Nov 27, 2007
Method for activating surface of base material and apparatus thereof
YOSHIDA HIDEO1 citations50
TOSHIBA MEMORY CORP
3 patentsUS10816896B2Oct 27, 2020
Method for manufacturing imprinting template substrate, imprinting template substrate, imprinting template, and method for manufacturing semiconductor apparatus
TOSHIBA MEMORY CORP0 citations52
US10359697B2Jul 23, 2019
Imprinting template substrate, method for manufacturing the same, imprinting template substrate manufacturing apparatus, and method for manufacturing semiconductor apparatus
TOSHIBA MEMORY CORP0 citations52
US10249545B2Apr 2, 2019
Method for processing substrate including forming a film on a silicon-containing surface of the substrate to prevent resist from extruding from the substrate during an imprinting process
TOSHIBA MEMORY CORP0 citations42