Inventor
HIROSE EIJI
JP10 patents
Patents
10 patentsUS6849154B2Feb 1, 2005
Plasma etching apparatus
TOKYO ELECTRON LTD99 citations96
US7265963B2Sep 4, 2007
Holding mechanism of object to be processed
TOKYO ELECTRON LTD52 citations94
US6746196B1Jun 8, 2004
Vacuum treatment device
TOKYO ELECTRON LTD21 citations92
US6305895B1Oct 23, 2001
Transfer system for vacuum process equipment
TOKYO ELECTRON LTD22 citations92
US6878233B2Apr 12, 2005
Workpiece holding mechanism
TOKYO ELECTRON LTD28 citations91
US6485602B2Nov 26, 2002
Plasma processing apparatus
TOKYO ELECTRON LTD21 citations91
USD459254SJun 25, 2002
Multi-chamber processing apparatus
TOKYO ELECTRON LTD2 citations62
US7553773B2Jun 30, 2009
Pressure control method and processing device
TOKYO ELECTRON LTD0 citations51
US7156949B2Jan 2, 2007
Plasma processing apparatus
TOKYO ELECTRON LTD1 citations51
US6908864B2Jun 21, 2005
Pressure control method and processing device
TOKYO ELECTRON LTD1 citations51