Inventor · disambiguated record
Yukio Tojo
Also filed as: TOJO YUKIO
8 granted patents·3 pending applications·47 citations·filing 1992–2024
83Inventor score
Top patents by PatentIndex Score
11 records- 0180US8664013B2Continuous processing system, continuous processing method, and programTOKYO ELECTRON LTD·Filed 2013·Granted Mar 4, 2014·5 cites·7 claims
- 0278US7727296B2Collecting unit for semiconductor processTOKYO ELECTRON LTD·Filed 2007·Granted Jun 1, 2010·17 cites·18 claims
- 0373US8222162B2Batch processing method for forming structure including amorphous carbon filmOKADA MITSUHIRO·Filed 2010·Granted Jul 17, 2012·3 cites·20 claims
- 0460US8592324B2Method for forming laminated structure including amorphous carbon filmOKADA MITSUHIRO·Filed 2011·Granted Nov 26, 2013·1 cites·20 claims
- 0558US2025140552A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0655US6925731B2Thin film forming apparatus cleaning methodTOKYO ELECTRON LTD·Filed 2002·Granted Aug 9, 2005·7 cites·22 claims
- 0749US5315402AVideo signal recording/reproducing system for increasing recording density of a frequency modulated signalSHARP KK·Filed 1992·Granted May 24, 1994·14 cites·7 claims
- 0848US8652973B2Processing method for forming structure including amorphous carbon filmOKADA MITSUHIRO·Filed 2012·Granted Feb 18, 2014·0 cites·20 claims
- 0938US2012247511A1Method for cleaning thin film forming apparatus, thin film forming method, and thin film forming apparatusOKADA MITSUHIRO·Filed 2012·Application pending·0 cites
- 1034US2005270405A1Image pickup device and camera moduleTANIDA YOSHINORI·Filed 2005·Application pending·0 cites
- 1131US6635310B1Method of heat treatmentTOKYO ELECTRON LTD·Filed 2000·Granted Oct 21, 2003·0 cites·8 claims
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