Inventor · disambiguated record
Andrew Graham
Also filed as: GRAHAM ANDREW · GRAHAM ANDREW B
28 granted patents·2 pending applications·44 citations·filing 2011–2017
94Inventor score
Top patents by PatentIndex Score
30 records- 0188US8906730B2Method of forming membranes with modified stress characteristicsGRAHAM ANDREW B·Filed 2011·Granted Dec 9, 2014·8 cites·20 claims
- 0286US9266716B2MEMS acoustic transducer with silicon nitride backplate and silicon sacrificial layerBOSCH GMBH ROBERT·Filed 2014·Granted Feb 23, 2016·8 cites·19 claims
- 0381US10184910B2Combined pressure and humidity sensorBOSCH TOOL CORP·Filed 2013·Granted Jan 22, 2019·7 cites·10 claims
- 0480US8673756B2Out-of-plane spacer defined electrodeGRAHAM ANDREW B·Filed 2011·Granted Mar 18, 2014·3 cites·9 claims
- 0576US9588073B2Resistive MEMS humidity sensorBOSCH GMBH ROBERT·Filed 2013·Granted Mar 7, 2017·2 cites·12 claims
- 0676US9511998B2MEMS device having a getterBOSCH GMBH ROBERT·Filed 2014·Granted Dec 6, 2016·3 cites·12 claims
- 0775US10175188B2Trench based capacitive humidity sensorBOSCH GMBH ROBERT·Filed 2013·Granted Jan 8, 2019·3 cites·7 claims
- 0873US10317211B2Robust inertial sensorsBOSCH GMBH ROBERT·Filed 2014·Granted Jun 11, 2019·3 cites·11 claims
- 0968US9064982B2Thin-film encapsulated infrared sensorBOSCH GMBH ROBERT·Filed 2013·Granted Jun 23, 2015·2 cites·16 claims
- 1063US9159637B2Electronic device with an interlocking mold packageBOSCH GMBH ROBERT·Filed 2014·Granted Oct 13, 2015·1 cites·20 claims
- 1162US8426289B2Wafer with spacer including horizontal memberGRAHAM ANDREW B·Filed 2011·Granted Apr 23, 2013·1 cites·20 claims
- 1260US10173887B2Epi-poly etch stop for out of plane spacer defined electrodeBOSCH GMBH ROBERT·Filed 2016·Granted Jan 8, 2019·0 cites·3 claims
- 1359US9073749B2Structured gap for a MEMS pressure sensorBOSCH GMBH ROBERT·Filed 2012·Granted Jul 7, 2015·2 cites·9 claims
- 1458US9469522B2Epi-poly etch stop for out of plane spacer defined electrodeBOSCH GMBH ROBERT·Filed 2014·Granted Oct 18, 2016·0 cites·7 claims
- 1557US9242850B2Out-of-plane spacer defined electrodeBOSCH GMBH ROBERT·Filed 2014·Granted Jan 26, 2016·0 cites·7 claims
- 1655US10183857B2MEMS pressure sensor with multiple membrane electrodesBOSCH GMBH ROBERT·Filed 2013·Granted Jan 22, 2019·1 cites·20 claims
- 1755US8890283B2Wafer with recessed plugBOSCH GMBH ROBERT·Filed 2014·Granted Nov 18, 2014·0 cites·8 claims
- 1854US9476779B2Sensor with an embedded thermistor for precise local temperature measurementBOSCH GMBH ROBERT·Filed 2013·Granted Oct 25, 2016·0 cites·8 claims
- 1951US8933535B2Wafer with spacer including horizontal memberBOSCH GMBH ROBERT·Filed 2013·Granted Jan 13, 2015·0 cites·17 claims
- 2050US9302906B2Capacitive pressure sensor and methodBOSCH GMBH ROBERT·Filed 2013·Granted Apr 5, 2016·0 cites·13 claims
- 2150US9233842B2Passivation layer for harsh environments and methods of fabrication thereofBOSCH GMBH ROBERT·Filed 2014·Granted Jan 12, 2016·0 cites·20 claims
- 2249US8647930B2Wafer with recessed plugGRAHAM ANDREW B·Filed 2011·Granted Feb 11, 2014·0 cites·20 claims
- 2347US10160632B2System and method for forming a buried lower electrode in conjunction with an encapsulated MEMS deviceBOSCH GMBH ROBERT·Filed 2013·Granted Dec 25, 2018·0 cites·18 claims
- 2446US8878314B2MEMS package or sensor package with intra-cap electrical via and method thereofGRAHAM ANDREW B·Filed 2012·Granted Nov 4, 2014·0 cites·18 claims
- 2545US8749000B2Pressure sensor with doped electrodeBOSCH GMBH ROBERT·Filed 2013·Granted Jun 10, 2014·0 cites·20 claims
- 2644US8580691B2Method of forming non-planar membranes using CMPGRAHAM ANDREW B·Filed 2011·Granted Nov 12, 2013·0 cites·16 claims
- 2743US9455353B2Substrate with multiple encapsulated devicesCHEN PO-JUI·Filed 2012·Granted Sep 27, 2016·0 cites·20 claims
- 2843US2014239421A1Surface charge mitigation layer for mems sensorsBOSCH GMBH ROBERT·Filed 2013·Application pending·0 cites
- 2942US10843917B2Micromechanical device having a decoupled micromechanical structureBOSCH GMBH ROBERT·Filed 2017·Granted Nov 24, 2020·0 cites·11 claims
- 3040US2014150560A1MEMS Pressure Sensor Assembly with Electromagnetic ShieldBOSCH GMBH ROBERT·Filed 2013·Application pending·0 cites
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