Inventor
VÄYRYNEN KATJA
FI13 patents
Patents
13 patentsUS10731249B2Aug 4, 2020
Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus
ASM IP HOLDING BV286 citations98
US11499222B2Nov 15, 2022
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
ASM IP HOLDING BV4 citations73
US11390946B2Jul 19, 2022
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
ASM IP HOLDING BV4 citations73
US10468261B2Nov 5, 2019
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
ASM IP HOLDING BV1 citations73
US11492703B2Nov 8, 2022
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
ASM IP HOLDING BV4 citations71
US12173402B2Dec 24, 2024
Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus
ASM IP HOLDING BV0 citations62
US12106965B2Oct 1, 2024
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
ASM IP HOLDING BV0 citations62
US11959171B2Apr 16, 2024
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
ASM IP HOLDING BV0 citations62
US11952658B2Apr 9, 2024
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
ASM IP HOLDING BV0 citations62
US11410851B2Aug 9, 2022
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
ASM IP HOLDING BV0 citations62
US11814715B2Nov 14, 2023
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
ASM IP HOLDING BV0 citations61
US10741403B2Aug 11, 2020
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
ASM IP HOLDING BV0 citations52
US10468262B2Nov 5, 2019
Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures
ASM IP HOLDING BV0 citations52