Inventor
VOLFOVSKI LEON
US31 patents
⚠️ This page may combine multiple inventors who share the name “VOLFOVSKI LEON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
22 patentsUS7925377B2Apr 12, 2011
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC45 citations97
US7743728B2Jun 29, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC36 citations96
US7694647B2Apr 13, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC42 citations96
US6454332B1Sep 24, 2002
Apparatus and methods for handling a substrate
APPLIED MATERIALS INC51 citations92
US9698074B2Jul 4, 2017
Heated substrate support with temperature profile control
APPLIED MATERIALS INC7 citations84
US9538583B2Jan 3, 2017
Substrate support with switchable multizone heater
APPLIED MATERIALS INC9 citations83
US10964584B2Mar 30, 2021
Process kit ring adaptor
APPLIED MATERIALS INC7 citations82
US7779527B2Aug 24, 2010
Methods and apparatus for installing a scrubber brush on a mandrel
APPLIED MATERIALS INC13 citations80
US9706605B2Jul 11, 2017
Substrate support with feedthrough structure
APPLIED MATERIALS INC2 citations72
US9698041B2Jul 4, 2017
Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods
APPLIED MATERIALS INC2 citations72
US11626305B2Apr 11, 2023
Sensor-based correction of robot-held object
APPLIED MATERIALS INC2 citations71
US11823937B2Nov 21, 2023
Calibration of an aligner station of a processing system
APPLIED MATERIALS INC3 citations70
US11211269B2Dec 28, 2021
Multi-object capable loadlock system
APPLIED MATERIALS INC3 citations68
US10736182B2Aug 4, 2020
Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers
APPLIED MATERIALS INC1 citations62
US12142503B2Nov 12, 2024
Sensor-based correction of robot-held object
APPLIED MATERIALS INC0 citations61
US11842917B2Dec 12, 2023
Process kit ring adaptor
APPLIED MATERIALS INC0 citations60
US7900311B2Mar 8, 2011
Wafer edge cleaning
APPLIED MATERIALS INC4 citations59
US10217650B2Feb 26, 2019
Methods and apparatus for substrate edge cleaning
APPLIED MATERIALS INC0 citations51
US9986598B2May 29, 2018
Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods
APPLIED MATERIALS INC0 citations51
US9443714B2Sep 13, 2016
Methods and apparatus for substrate edge cleaning
APPLIED MATERIALS INC0 citations51
US12165905B2Dec 10, 2024
Process kit enclosure system
APPLIED MATERIALS INC0 citations50
US11600580B2Mar 7, 2023
Replaceable end effector contact pads, end effectors, and maintenance methods
APPLIED MATERIALS INC0 citations44
ISHIKAWA TETSUYA
4 patentsUS8550031B2Oct 8, 2013
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA13 citations92
US8215262B2Jul 10, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8181596B2May 22, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8146530B2Apr 3, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA22 citations92