P

Inventor

SCHMID ANDREAS

CH88 patents
⚠️ This page may combine multiple inventors who share the name “SCHMID ANDREAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

18 patents
USD1055006SDec 24, 2024

Support ring for an interlocking process kit for a substrate processing chamber

APPLIED MATERIALS INC6 citations82
US10964584B2Mar 30, 2021

Process kit ring adaptor

APPLIED MATERIALS INC7 citations82
US12009236B2Jun 11, 2024

Sensors and system for in-situ edge ring erosion monitor

APPLIED MATERIALS INC3 citations73
US11043400B2Jun 22, 2021

Movable and removable process kit

APPLIED MATERIALS INC3 citations73
US11764041B2Sep 19, 2023

Adjustable thermal break in a substrate support

APPLIED MATERIALS INC4 citations72
US11646183B2May 9, 2023

Substrate support assembly with arc resistant coolant conduit

APPLIED MATERIALS INC4 citations72
US11075105B2Jul 27, 2021

In-situ apparatus for semiconductor process module

APPLIED MATERIALS INC2 citations72
USD1042374SSep 17, 2024

Support pipe for an interlocking process kit for a substrate processing chamber

APPLIED MATERIALS INC3 citations71
US11569114B2Jan 31, 2023

Semiconductor processing with cooled electrostatic chuck

APPLIED MATERIALS INC2 citations71
US11380572B2Jul 5, 2022

Substrate support carrier with improved bond layer protection

APPLIED MATERIALS INC4 citations71
US10490435B2Nov 26, 2019

Cooling element for an electrostatic chuck assembly

APPLIED MATERIALS INC3 citations71
US11823937B2Nov 21, 2023

Calibration of an aligner station of a processing system

APPLIED MATERIALS INC3 citations70
US11101115B2Aug 24, 2021

Ring removal from processing chamber

APPLIED MATERIALS INC2 citations70
USD1042373SSep 17, 2024

Sliding ring for an interlocking process kit for a substrate processing chamber

APPLIED MATERIALS INC2 citations69
US11373893B2Jun 28, 2022

Cryogenic electrostatic chuck

APPLIED MATERIALS INC3 citations69
US11887879B2Jan 30, 2024

In-situ apparatus for semiconductor process module

APPLIED MATERIALS INC0 citations62
US11721569B2Aug 8, 2023

Method and apparatus for determining a position of a ring within a process kit

APPLIED MATERIALS INC0 citations61
US11668553B2Jun 6, 2023

Apparatus and method for controlling edge ring variation

APPLIED MATERIALS INC0 citations61

SCHMID ANDREAS

4 patents

FESTO AG & CO

3 patents

VEONEER SWEDEN AB

3 patents

INFINEON TECHNOLOGIES AG

3 patents

CUREVAC REAL ESTATE GMBH

2 patents

CUREVAC AG

1 patent

(unassigned)

1 patent

FEI CO

1 patent

CUREVAC MFG GMBH

1 patent

IBM

1 patent

BROSE FAHRZEUGTEILE

1 patent

EMU UNTERWASSERPUMPEN GMBH

1 patent

BASF AG

1 patent

KAPPLA OLAF

1 patent

KARAU ANDREAS

1 patent

THIEL NORBERT

1 patent

PÖTTER MARKUS

1 patent

SONY DEUTSCHLAND GMBH

1 patent

SANDIA NAT LAB

1 patent

ZAHNRADFABRIK FRIEDRICHSHAFEN

1 patent

INTEL MOBILE COMM GMBH

1 patent

ARRIVER SOFTWARE AB

1 patent

Showing the top 50 of 88 patents by PatentIndex Score.