Inventor
SHIRAKAWA EIICHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “SHIRAKAWA EIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
15 patentsUS6291800B1Sep 18, 2001
Heat treatment apparatus and substrate processing system
TOKYO ELECTRON LTD86 citations97
US6222161B1Apr 24, 2001
Heat treatment apparatus
TOKYO ELECTRON LTD84 citations97
US6191394B1Feb 20, 2001
Heat treating apparatus
TOKYO ELECTRON LTD85 citations97
US6229116B1May 8, 2001
Heat treatment apparatus
TOKYO ELECTRON LTD57 citations96
US6841342B2Jan 11, 2005
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD61 citations95
US6474986B2Nov 5, 2002
Hot plate cooling method and heat processing apparatus
TOKYO ELECTRON LTD71 citations95
US6753508B2Jun 22, 2004
Heating apparatus and heating method
TOKYO ELECTRON LTD53 citations92
US6450803B2Sep 17, 2002
Heat treatment apparatus
TOKYO ELECTRON LTD26 citations92
US6380518B2Apr 30, 2002
Heat treatment apparatus and substrate processing system
TOKYO ELECTRON LTD36 citations92
US6228171B1May 8, 2001
Heat processing apparatus
TOKYO ELECTRON LTD52 citations92
US5070813ADec 10, 1991
Coating apparatus
TOKYO ELECTRON LTD42 citations91
US6744020B2Jun 1, 2004
Heat processing apparatus
TOKYO ELECTRON LTD24 citations90
US6644964B2Nov 11, 2003
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD17 citations83
USRE40052EFeb 12, 2008
Heat treatment apparatus
TOKYO ELECTRON LTD8 citations73
US5038608AAug 13, 1991
Method for measuring the flow rate of exhaust gas
TOKYO ELECTRON LTD6 citations62